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\u3010\u6975\u7d2b\u5916\u5149\u523b\u3011<\/span><\/strong>
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\u7de8\u8f2f\u63a8\u85a6<\/span><\/strong><\/p>\n

1.\u672c\u66f8\u6982\u6cc1<\/p>\n

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2.\u672c\u66f8\u7279\u8272<\/p>\n

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\u5167\u5bb9\u7c21\u4ecb<\/span><\/strong><\/p>\n

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\u4f5c\u8005\u7c21\u4ecb<\/span><\/strong><\/p>\n

\u54c8\u5229?\u5091?\u840a\u6587\u68ee\uff08Harry J.Levinson\uff09\uff0c\u570b\u969b\u5149\u5b78\u5de5\u7a0b\u5b78\u6703\uff08SPIE\uff09\u6703\u58eb\uff0cHJL Lithography\u7684\u7368\u7acb\u5149\u523b\u9867\u554f\u548c\u9996\u5e2d\u5149\u523b\u5e2b\uff0c\u5c08\u6ce8\u65bc\u5149\u523b\u9818\u57df\u591a\u5e74\u3002 \u66fe\u5728Sierra Semiconductor\u548cIBM\u64d4\u4efb\u904e\u8077\u4f4d\u3002 \u66fe\u5c07\u5149\u523b\u61c9\u7528\u65bc\u8a31\u591a\u4e0d\u540c\u7684\u79d1\u6280\uff0c\u5305\u62ec\u96d9\u6975\u8a18\u61b6\u9ad4\u300164MB\u548c256MB DRAM\u958b\u767c\u3001\u5c08\u7528\u96c6\u6210\u96fb\u8def\u6676\u7247\u88fd\u9020\u3001\u78c1\u8a18\u9304\u8584\u819c\u78c1\u982d\u3001\u9583\u5b58\u548c\u5148\u9032\u908f\u8f2f\u6676\u7247\u7b49\u3002 \u66fe\u6578\u5e74\u64d4\u4efb\u7f8e\u570b\u5149\u523b\u6280\u8853\u5de5\u4f5c\u7d44\u4e3b\u5e2d\uff0c\u53c3\u8207\u88fd\u5b9a\u4e86\u300a\u570b\u969b\u534a\u5c0e\u9ad4\u6280\u8853\u8def\u7dda\u5716\u300b\u4e2d\u6709\u95dc\u5149\u523b\u6280\u8853\u7684\u7ae0\u7bc0\u3002 \u4ed6\u662f\u77fd\u8c37\u9996\u6279SVG-5\u500d\u6b65\u9032\u5f0f\u5149\u523b\u6a5f\u7684\u7528\u6236\u4e4b\u4e00\uff0c\u4e5f\u662f248nm\u3001193nm\u548c\u6975\u7d2b\u5916\u5149\u523b\u7684\u65e9\u671f\u53c3\u8207\u8005\uff1b \u64b0\u5beb\u7684\u8457\u4f5c\u9084\u6709\uff1a\u300a\u5149\u523b\u5de5\u85dd\u63a7\u5236\u300b\u300a\u5149\u523b\u539f\u7406\u300b\uff0c\u64c1\u670970\u591a\u9805\u7f8e\u570b\u5c08\u5229\u3002<\/p>\n

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\u76ee\u9304<\/span><\/strong><\/p>\n

\u7b2c1\u7ae0\u7dd2\u8ad6<\/p>\n

1.1\u5149\u523b\u6280\u8853\u7684\u6b77\u53f2\u80cc\u666f\/1<\/p>\n

1.2\u5149\u523b\u6280\u8853\u7684\u7d44\u6210\u90e8\u5206\/3<\/p>\n

1.3\u8cc7\u6599\u8003\u91cf\u548c\u591a\u5c64\u819c\u53cd\u5c04\u93e1\/4<\/p>\n

1.4\u4e00\u822c\u6027\u554f\u984c\/11<\/p>\n

\u7fd2\u984c\/12<\/p>\n

\u53c3\u8003\u6587\u737b\/12<\/p>\n

\u7b2c2\u7ae0EUV\u5149\u6e90<\/p>\n

2.1\u96f7\u5c04\u7535\u6d46\u5149\u6e90\/15<\/p>\n

2.2\u653e\u96fb\u7535\u6d46\u5149\u6e90\/28<\/p>\n

2.3\u81ea\u7531\u96fb\u5b50\u96f7\u5c04\u5668\/32<\/p>\n

\u7fd2\u984c\/36<\/p>\n

\u53c3\u8003\u6587\u737b\/36<\/p>\n

\u7b2c3\u7ae0EUV\u5149\u523b\u66dd\u5149\u7cfb\u7d71<\/p>\n

3.1\u771f\u7a7a\u4e2d\u7684EUV\u5149\u523b\/40<\/p>\n

3.2\u7167\u660e\u7cfb\u7d71\/45<\/p>\n

3.3\u6295\u5f71\u7cfb\u7d71\/47<\/p>\n

3.4\u5c0d\u6e96\u7cfb\u7d71\/52<\/p>\n

3.5\u5de5\u4ef6\u81fa\u7cfb\u7d71\/53<\/p>\n

3.6\u805a\u7126\u7cfb\u7d71\/54<\/p>\n

\u7fd2\u984c\/55<\/p>\n

\u53c3\u8003\u6587\u737b\/56<\/p>\n

\u7b2c4\u7ae0EUV\u63a9\u6a21<\/p>\n

4.1 EUV\u63a9\u6a21\u7d50\u69cb\/60<\/p>\n

4.2\u591a\u5c64\u819c\u548c\u63a9\u6a21\u57fa\u677f\u7f3a\u9677\/66<\/p>\n

4.3\u63a9\u6a21\u5e73\u6574\u5ea6\u548c\u7c97\u7cd9\u5ea6\/71<\/p>\n

4.4 EUV\u63a9\u6a21\u88fd\u4f5c\/74<\/p>\n

4.5 EUV\u63a9\u6a21\u4fdd\u8b77\u819c\/75<\/p>\n

4.6 EUV\u63a9\u6a21\u653e\u7f6e\u76d2\/83<\/p>\n

4.7\u5176\u4ed6EUV\u63a9\u6a21\u5438\u6536\u5c64\u8207\u63a9\u6a21\u67b6\u69cb\/85<\/p>\n

\u7fd2\u984c\/88<\/p>\n

\u53c3\u8003\u6587\u737b\/88<\/p>\n

\u7b2c5\u7ae0EUV\u5149\u523b\u81a0<\/p>\n

5.1 EUV\u5316\u5b78\u653e\u5927\u5149\u523b\u81a0\u7684\u66dd\u5149\u6a5f\u5236\/95<\/p>\n

5.2 EUV\u5149\u523b\u4e2d\u7684\u96a8\u6a5f\u6548\u61c9\/98<\/p>\n

5.3\u5316\u5b78\u653e\u5927\u5149\u523b\u81a0\u7684\u65b0\u6982\u5ff5\/108<\/p>\n

5.4\u91d1\u5c6c\u6c27\u5316\u7269EUV\u5149\u523b\u81a0\/110<\/p>\n

5.5\u65b7\u88c2\u5f0f\u5149\u523b\u81a0\/111<\/p>\n

5.6\u771f\u7a7a\u6c89\u7a4d\u5149\u523b\u81a0\/111<\/p>\n

5.7\u5149\u523b\u81a0\u896f\u5e95\u8cc7\u6599\/113<\/p>\n

\u7fd2\u984c\/114<\/p>\n

\u53c3\u8003\u6587\u737b\/115<\/p>\n

\u7b2c6\u7ae0EUV\u8a08\u7b97\u5149\u523b<\/p>\n

6.1\u50b3\u7d71\u5149\u5b78\u9130\u8fd1\u6821\u6b63\u7684\u8003\u91cf\u56e0\u7d20\/121<\/p>\n

6.2 EUV\u63a9\u6a21\u7684\u4e09\u7dad\u6548\u61c9\/125<\/p>\n

6.3\u5149\u523b\u81a0\u7684\u7269\u7406\u6a5f\u7406\/133<\/p>\n

6.4 EUV\u5149\u523b\u7684\u6210\u50cf\u512a\u5316\/135<\/p>\n

\u7fd2\u984c\/138<\/p>\n

\u53c3\u8003\u6587\u737b\/139<\/p>\n

\u7b2c7\u7ae0EUV\u5149\u523b\u5de5\u85dd\u63a7\u5236<\/p>\n

7.1\u5957\u523b\/144<\/p>\n

7.2\u95dc\u9375\u5c3a\u5bf8\u63a7\u5236\/149<\/p>\n

7.3\u826f\u7387\/ 151<\/p>\n

\u7fd2\u984c\/155<\/p>\n

\u53c3\u8003\u6587\u737b\/156<\/p>\n

\u7b2c8\u7ae0EUV\u5149\u523b\u7684\u91cf\u6e2c<\/p>\n

8.1\u63a9\u6a21\u57fa\u677f\u7f3a\u9677\u6aa2\u6e2c\/160<\/p>\n

8.2 EUV\u63a9\u6a21\u6e2c\u8a55\u5de5\u5177\/163<\/p>\n

8.3\u91cf\u7522\u63a9\u6a21\u9a57\u6536\u5de5\u5177\/165<\/p>\n

8.4\u8cc7\u6599\u6e2c\u8a66\u5de5\u5177\/168<\/p>\n

\u7fd2\u984c\/169<\/p>\n

\u53c3\u8003\u6587\u737b\/170<\/p>\n

\u7b2c9\u7ae0EUV\u5149\u523b\u6210\u672c<\/p>\n

9.1\u6676\u5713\u6210\u672c\/173<\/p>\n

9.2\u63a9\u6a21\u6210\u672c\/181<\/p>\n

\u7fd2\u984c\/182<\/p>\n

\u53c3\u8003\u6587\u737b\/182<\/p>\n

\u7b2c10\u7ae0\u672a\u4f86\u7684EUV\u5149\u523b<\/p>\n

10.1 k\u3010\u80fd\u8d70\u591a\u4f4e\/184<\/p>\n

10.2\u66f4\u9ad8\u7684\u6578\u503c\u5b54\u5f91\/186<\/p>\n

10.3\u66f4\u77ed\u7684\u6ce2\u9577\/193<\/p>\n

10.4 EUV\u591a\u91cd\u6210\u5f62\u6280\u8853\/194<\/p>\n

10.5 EUV\u5149\u523b\u7684\u672a\u4f86\/195<\/p>\n

\u7fd2\u984c\/195<\/p>\n

\u53c3\u8003\u6587\u737b\/196<\/p>\n

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