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\"\u6625\u8282.jpg\"<\/span><\/strong><\/p>\n

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\u3010\u8a08\u7b97\u5149\u523b\u8207\u7248\u5716\u512a\u5316\u3011<\/span><\/strong><\/span><\/strong><\/p>\n

\u5167\u5bb9\u7c21\u4ecb<\/span><\/strong><\/p>\n

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\u300a\u8a08\u7b97\u5149\u523b\u8207\u7248\u5716\u512a\u5316\u300b\u5167\u5bb9\u7dca\u6263\u5148\u9032\u79d1\u6280\u7bc0\u9ede\u96c6\u6210\u96fb\u8def\u88fd\u9020\u7684\u5be6\u969b\u60c5\u6cc1\uff0c\u6db5\u84cb\u8a08\u7b97\u5149\u523b\u8207\u7248\u5716\u512a\u5316\u7684\u767c\u5c55\u72c0\u614b\u548c\u672a\u4f86\u8da8\u52e2\uff0c\u7cfb\u7d71\u4ecb\u7d39\u4e86\u8a08\u7b97\u5149\u523b\u8207\u523b\u8755\u7684\u7406\u8ad6\uff0c\u8ad6\u8ff0\u4e86\u7248\u5716\u8a2d\u8a08\u8207\u5236\u9020\u6280\u8853\u7684\u95dc\u7cfb\uff0c\u4ee5\u53ca\u7248\u5716\u8a2d\u8a08\u5c0d\u88fd\u9020\u826f\u7387\u7684\u5f71\u97ff\uff0c\u8b1b\u8ff0\u548c\u8a0e\u8ad6\u4e86\u7248\u5716\u8a2d\u8a08\u8207\u5236\u9020\u6280\u8853\u5354\u540c\u512a\u5316\u7684\u6982\u5ff5\u548c\u65b9\u6cd5\u8ad6\uff0c \u4e26\u7d50\u5408\u5177\u9ad4\u5be6\u65bd\u6848\u4f8b\u4ecb\u7d39\u4e86\u696d\u754c\u7684\u5177\u9ad4\u505a\u6cd5\u3002 \u672c\u66f8\u4e0d\u50c5\u9069\u5408\u7a4d\u9ad4\u96fb\u8def\u8a2d\u8a08\u8207\u88fd\u9020\u9818\u57df\u7684\u5f9e\u696d\u8005\u95b1\u8b80\uff0c\u800c\u4e14\u9069\u5408\u9ad8\u7b49\u9662\u6821\u5fae\u96fb\u5b50\u76f8\u95dc\u5c08\u696d\u7684\u5927\u5b78\u751f\u3001\u7814\u7a76\u751f\u95b1\u8b80\u548c\u53c3\u6537\u3002<\/p>\n

\u4f5c\u8005\u7c21\u4ecb<\/span><\/strong><\/p>\n

\u97cb\u4e9e\u4e00\u535a\u58eb\uff0c\u4e2d\u570b\u79d1\u5b78\u9662\u5fae\u96fb\u5b50\u7814\u7a76\u6240\u7814\u7a76\u54e1\uff0c\u4e2d\u570b\u79d1\u5b78\u9662\u5927\u5b78\u5fae\u96fb\u5b50\u5b78\u9662\u6559\u6388\uff0c\u535a\u58eb\u751f\u5c0e\u5e2b\u3002 1998\u5e74\u7562\u696d\u65bc\u5fb7\u570bStuttgart\u5927\u5b78\/\u99ac\u666e\u56fa\u9ad4\u7814\u7a76\u6240\uff0c\u5e2b\u5f9e\u8afe\u8c9d\u723e\u7269\u7406\u734e\u5f97\u4e3b\u99ae?\u514b\u5229\u6d25\uff08Klaus von Klitzing\uff09\uff0c\u7372\u535a\u58eb\u5b78\u4f4d\u3002 \u97cb\u4e9e\u4e00\u535a\u58eb\u9577\u671f\u5f9e\u4e8b\u96fb\u6676\u9ad4\u5149\u523b\u8a2d\u5099\u3001\u8cc7\u6599\u3001\u8edf\u4ef6\u548c\u5236\u7a0b\u7814\u767c\uff0c\u53d6\u5f97\u4e86\u591a\u9805\u6838\u5fc3\u6280\u8853\uff0c\u767c\u8868\u4e86\u8d85\u904e90\u7bc7\u7684\u5c08\u696d\u6587\u737b\u3002 \u97cb\u4e9e\u4e00\u535a\u58eb\u5728\u4e2d\u570b\u79d1\u5b78\u9662\u5fae\u96fb\u5b50\u7814\u7a76\u6240\u5275\u7acb\u4e86\u8a08\u7b97\u5149\u523b\u7814\u767c\u4e2d\u5fc3\uff0c\u5f9e\u4e8b20nm\u4ee5\u4e0b\u79d1\u6280\u7bc0\u9ede\u7684\u8a08\u7b97\u5149\u523b\u6280\u8853\u7814\u7a76\uff0c\u5176\u7814\u7a76\u6210\u679c\u88ab\u5ee3\u6cdb\u61c9\u7528\u65bc\u570b\u5167FinFET\u548c3D NAND\u7684\u91cf\u7522\u5de5\u85dd\u4e2d\u3002<\/p>\n

\u7c9f\u96c5\u5a1f\u535a\u58eb\uff0c\u4e2d\u570b\u79d1\u5b78\u9662\u5fae\u96fb\u5b50\u7814\u7a76\u6240\u7814\u7a76\u54e1\uff0c\u78a9\u58eb\u751f\u5c0e\u5e2b\u3002 2005\u5e74\u7562\u696d\u65bc\u6e05\u83ef\u5927\u5b78\uff0c\u7372\u535a\u58eb\u5b78\u4f4d\u3002 \u7c9f\u96c5\u5a1f\u535a\u58eb\u4e3b\u8981\u5f9e\u4e8b\u8a2d\u8a08\u5de5\u85dd\u5354\u540c\u512a\u5316\u3001\u8a08\u7b97\u5149\u523b\u7b49\u9818\u57df\u7684\u7814\u7a76\u3002 \u767c\u8868SCI\/EI\u5b78\u8853\u8ad6\u658730\u9918\u7bc7\uff0c\u7533\u8acb\u5c08\u522910\u9918\u9805\u3002 \u5176\u7814\u7a76\u6210\u679c\u88ab\u61c9\u7528\u65bc\u570b\u5167\u8a2d\u8a08\u548c\u88fd\u9020\u4f01\u696d\u7684\u8a2d\u8a08\u5de5\u85dd\u5354\u540c\u512a\u5316\u4e2d\u3002<\/p>\n

\u8463\u7acb\u677e\u535a\u58eb\uff0c\u4e2d\u570b\u79d1\u5b78\u9662\u5fae\u96fb\u5b50\u7814\u7a76\u6240\u526f\u7814\u7a76\u54e1\uff0c\u78a9\u58eb\u751f\u5c0e\u5e2b\u3002 2014\u5e74\u7562\u696d\u65bc\u5317\u4eac\u7406\u5de5\u5927\u5b78\uff0c\u7372\u535a\u58eb\u5b78\u4f4d\u3002 \u8463\u7acb\u677e\u535a\u58eb\u4e3b\u8981\u5f9e\u4e8b\u5149\u523b\u6210\u50cf\u7406\u8ad6\u3001\u5206\u8faf\u7387\u589e\u5f3a\u3001SMO\u3001OPC\u7b49\u79d1\u6280\u7684\u7814\u7a76\u5de5\u4f5c\u3002 \u767c\u8868SCI\/EI\u5b78\u8853\u8ad6\u658730\u9918\u7bc7\uff0c\u7533\u8acb\u5c08\u522910\u9918\u9805\u3002<\/p>\n

\u5f35\u5229\u658c\u535a\u58eb\uff0c\u4e2d\u570b\u79d1\u5b78\u9662\u5fae\u96fb\u5b50\u7814\u7a76\u6240\u526f\u7814\u7a76\u54e1\uff0c\u78a9\u58eb\u751f\u5c0e\u5e2b\u3002 2014\u5e74\u7562\u696d\u65bc\u4e2d\u570b\u79d1\u5b78\u9662\u5927\u5b78\uff08\u4e2d\u570b\u79d1\u5b78\u9662\u96fb\u6676\u9ad4\u7814\u7a76\u6240\uff09\uff0c\u7372\u5de5\u5b78\u535a\u58eb\u5b78\u4f4d\u3002 \u4e3b\u8981\u5f9e\u4e8b\u5149\u523b\u5de5\u85dd\u548c\u91cf\u6e2c\u7684\u8868\u5fb5\u548c\u5efa\u6a21\u7b49\u7814\u7a76\u5de5\u4f5c\u3002 \u5171\u767c\u8868\u5b78\u8853\u8ad6\u658740\u9918\u7bc7\uff0c\u7533\u8acb\u5c08\u522910\u9918\u9805\u3002<\/p>\n

\u9673\u777f\u535a\u58eb\uff0c\u4e2d\u570b\u79d1\u5b78\u9662\u5fae\u96fb\u5b50\u7814\u7a76\u6240\u526f\u7814\u7a76\u54e1\uff0c\u78a9\u58eb\u751f\u5c0e\u5e2b\u3002 2015\u5e74\u7562\u696d\u65bc\u7f8e\u570b\u7d10\u7d04\u5dde\u7acb\u5927\u5b78\u5e03\u6cd5\u7f85\u5206\u6821\uff0c\u7372\u535a\u58eb\u5b78\u4f4d\u3002 \u9673\u777f\u535a\u58eb\u4e3b\u8981\u5f9e\u4e8b\u5148\u9032\u79d1\u6280\u7bc0\u9ede\u5149\u523b\u5de5\u85dd\u3001\u523b\u8755\u8207\u6c89\u7a4d\u5de5\u85dd\u6a21\u64ec\u7b49\u9818\u57df\u7684\u7814\u7a76\u3002 \u767c\u8868SCI\/EI\u5b78\u8853\u8ad6\u658730\u9918\u7bc7\uff0c\u7533\u8acb\u5c08\u522920\u9918\u9805\u3002 \u7814\u7a76\u6210\u679c\u88ab\u61c9\u7528\u65bc\u570b\u5167\u5916\u5148\u9032\u88fd\u9020\u4f01\u696d\u7684\u5de5\u85dd\u7814\u767c\u548c\u751f\u7522\u4e2d\u3002<\/p>\n

\u8d99\u5229\u4fca\u535a\u58eb\uff0c2018\u5e74\u7562\u696d\u65bc\u4e2d\u570b\u79d1\u5b78\u9662\u5fae\u96fb\u5b50\u7814\u7a76\u6240\u7372\u5de5\u5b78\u535a\u58eb\u5b78\u4f4d\uff0c\u540c\u5e74\u52a0\u5165\u9577\u6c5f\u5b58\u5132\u3002 \u535a\u58eb\u53ca\u5de5\u4f5c\u671f\u9593\u4e3b\u8981\u5f9e\u4e8bSMO\u3001OPC\u53ca\u6578\u4f4d\u96fb\u8def\u7269\u7406\u8a2d\u8a08\u7b49\u5de5\u4f5c\u3002 \u767c\u8868\u5b78\u8853\u8ad6\u65878\u7bc7\uff0c\u7533\u8acb\u5c08\u52295\u9805\u3002<\/p>\n

\u76ee\u9304<\/span><\/strong><\/p>\n

\u7b2c1\u7ae0\u6982\u8ff01<\/p>\n

1.1\u96c6\u6210\u96fb\u8def\u7684\u8a2d\u8a08\u6d41\u7a0b\u548c\u8a2d\u8a08\u5de5\u51773<\/p>\n

1.1.1\u96c6\u6210\u96fb\u8def\u7684\u8a2d\u8a08\u6d41\u7a0b3<\/p>\n

1.1.2\u8a2d\u8a08\u5de5\u5177\uff08EDA tools\uff095<\/p>\n

1.1.3\u8a2d\u8a08\u65b9\u6cd5\u4ecb\u7d397<\/p>\n

1.2\u96c6\u6210\u96fb\u8def\u88fd\u9020\u6d41\u7a0b9<\/p>\n

1.3\u53ef\u88fd\u9020\u6027\u6aa2\u67e5\u8207\u8a2d\u8a08\u88fd\u9020\u5354\u540c\u512a\u531619<\/p>\n

1.3.1\u53ef\u88fd\u9020\u6027\u6aa2\u67e5\uff08DFM\uff0920<\/p>\n

1.3.2\u8a2d\u8a08\u8207\u88fd\u9020\u6280\u8853\u5354\u540c\u512a\u5316\uff08DTCO\uff0920<\/p>\n

\u672c\u7ae0\u53c3\u8003\u6587\u737b21<\/p>\n

\u7b2c2\u7ae0\u96c6\u6210\u96fb\u8def\u7269\u7406\u8a2d\u8a0822<\/p>\n

2.1\u8a2d\u8a08\u5c0e\u516523<\/p>\n

2.1.1\u5de5\u85dd\u8a2d\u8a08\u5957\u4ef6\u7684\u7d44\u621023<\/p>\n

2.1.2\u6a19\u6e96\u55ae\u514324<\/p>\n

2.1.3\u8a2d\u8a08\u5c0e\u5165\u6d41\u7a0b25<\/p>\n

2.1.4\u6a19\u6e96\u55ae\u5143\u985e\u578b\u9078\u53d6\u53caIP\u6e05\u55ae26<\/p>\n

2.2\u5e03\u5716\u8207\u96fb\u6e90\u898f\u528326<\/p>\n

2.2.1\u6676\u7247\u9762\u7a4d\u898f\u528326<\/p>\n

2.2.2\u96fb\u6e90\u7db2\u8def\u8a2d\u8a0827<\/p>\n

2.2.3 SRAM\u3001IP\u3001\u57e0\u5206\u4f4828<\/p>\n

2.2.4\u4f4e\u529f\u8017\u8a2d\u8a08\u8207\u901a\u7528\u529f\u8017\u683c\u5f0f\u5c0e\u516528<\/p>\n

2.3\u4f48\u5c4030<\/p>\n

2.3.1\u6a21\u584a\u7d04\u675f\u985e\u578b30<\/p>\n

2.3.2\u64c1\u585e31<\/p>\n

2.3.3\u5716\u5f62\u5bc6\u5ea632<\/p>\n

2.3.4\u5eab\u4ea4\u63db\u683c\u5f0f\u512a\u531632<\/p>\n

2.3.5\u9396\u5b58\u5668\u7684\u4f4d\u7f6e\u5206\u4f4833<\/p>\n

2.3.6\u6709\u7528\u6642\u9418\u504f\u5dee\u7684\u4f7f\u752833<\/p>\n

2.4\u6642\u9418\u6a39\u7d9c\u540835<\/p>\n

2.4.1 CTS Specification\u4ecb\u7d3935<\/p>\n

2.4.2\u6642\u9418\u6a39\u7d1a\u657835<\/p>\n

2.4.3\u6642\u9418\u6a39\u55ae\u5143\u9078\u53d6\u53ca\u5206\u4f48\u63a7\u523636<\/p>\n

2.4.4\u6642\u9418\u6a39\u7684\u751f\u6210\u53ca\u512a\u531636<\/p>\n

2.5\u4f48\u7dda36<\/p>\n

2.5.1\u975e\u5e38\u898f\u7684\u8a2d\u8a08\u898f\u524736<\/p>\n

2.5.2\u906e\u7f6937<\/p>\n

2.5.3\u5929\u7dda\u6548\u61c937<\/p>\n

2.6\u7c3d\u683839<\/p>\n

2.6.1\u975c\u614b\u6642\u5e8f\u5206\u679039<\/p>\n

2.6.2\u529f\u801744<\/p>\n

2.6.3\u7269\u7406\u9a57\u8b4945<\/p>\n

\u672c\u7ae0\u53c3\u8003\u6587\u737b47<\/p>\n

\u7b2c3\u7ae0\u5149\u523b\u6a21\u578b48<\/p>\n

3.1\u57fa\u672c\u7684\u5149\u5b78\u6210\u50cf\u7406\u8ad648<\/p>\n

3.1.1\u7d93\u5178\u7e5e\u5c04\u7406\u8ad648<\/p>\n

3.1.2\u963f\u8c9d\u6210\u50cf\u7406\u8ad653<\/p>\n

3.2\u5149\u523b\u5149\u5b78\u6210\u50cf\u7406\u8ad654<\/p>\n

3.2.1\u5149\u523b\u7cfb\u7d71\u7684\u5149\u5b78\u7279\u5fb554<\/p>\n

3.2.2\u5149\u523b\u6210\u50cf\u7406\u8ad667<\/p>\n

3.3\u5149\u523b\u81a0\u6a21\u578b74<\/p>\n

3.3.1\u5149\u523b\u81a0\u95be\u503c\u6a21\u578b74<\/p>\n

3.3.2\u5149\u523b\u81a0\u7269\u7406\u6a21\u578b75<\/p>\n

3.4\u5149\u523b\u5149\u5b78\u6210\u50cf\u7684\u8a55\u4f30\u540d\u984d77<\/p>\n

3.4.1\u95dc\u9375\u5c3a\u5bf8\u53ca\u5176\u5747\u52fb\u602777<\/p>\n

3.4.2\u5c0d\u6bd4\u5ea6\u548c\u5f71\u50cf\u5c0d\u6578\u659c\u738778<\/p>\n

3.4.3\u63a9\u6a21\u8aa4\u5dee\u589e\u5f3a\u56e0\u657879<\/p>\n

3.4.4\u7126\u6df1\u8207\u5de5\u85dd\u8996\u7a9780<\/p>\n

3.4.5\u5de5\u85dd\u8b8a\u5316\u5e36\uff08PV-band\uff0982<\/p>\n

\u672c\u7ae0\u53c3\u8003\u6587\u737b82<\/p>\n

\u7b2c4\u7ae0\u5206\u8faf\u7387\u589e\u5f3a\u79d1\u628084<\/p>\n

4.1\u50b3\u7d71\u5206\u8faf\u7387\u589e\u5f3a\u79d1\u628086<\/p>\n

4.1.1\u96e2\u8ef8\u7167\u660e86<\/p>\n

4.1.2\u76f8\u79fb\u63a9\u6a2189<\/p>\n

4.2\u591a\u91cd\u5716\u5f62\u79d1\u628092<\/p>\n

4.2.1\u96d9\u91cd\u53ca\u591a\u91cd\u5149\u523b\u6280\u885393<\/p>\n

4.2.2\u81ea\u5c0d\u6e96\u96d9\u91cd\u53ca\u591a\u91cd\u5716\u5f62\u6210\u50cf\u79d1\u628099<\/p>\n

4.2.3\u88c1\u526a\u79d1\u6280104<\/p>\n

4.3\u5149\u5b78\u9130\u8fd1\u6548\u61c9\u4fee\u6b63\u79d1\u6280107<\/p>\n

4.3.1 RB-OPC\u548cMB-OPC 108<\/p>\n

4.3.2\u4e9e\u5206\u8fa8\u8f14\u52a9\u5716\u5f62\u6dfb\u52a0109<\/p>\n

4.3.3\u9006\u5411\u5149\u523b\u6280\u8853110<\/p>\n

4.3.4 OPC\u79d1\u6280\u7684\u7522\u696d\u5316\u61c9\u7528113<\/p>\n

4.4\u5149\u6e90\uff1f \u63a9\u6a21\u806f\u5408\u512a\u5316\u79d1\u6280117<\/p>\n

4.4.1 SMO\u79d1\u6280\u7684\u767c\u5c55\u6b77\u53f2\u8207\u57fa\u672c\u539f\u7406117<\/p>\n

4.4.2 SMO\u79d1\u6280\u7684\u7522\u696d\u5316\u61c9\u7528119<\/p>\n

\u672c\u7ae0\u53c3\u8003\u6587\u737b123<\/p>\n

\u7b2c5\u7ae0\u523b\u8755\u6548\u61c9\u4fee\u6b63125<\/p>\n

5.1\u523b\u8755\u6548\u61c9\u4fee\u6b63\u6d41\u7a0b126<\/p>\n

5.2\u57fa\u65bc\u898f\u5247\u7684\u523b\u8755\u6548\u61c9\u4fee\u6b63128<\/p>\n

5.2.1\u57fa\u65bc\u898f\u5247\u7684\u523b\u8755\u6548\u61c9\u4fee\u6b63\u7684\u65b9\u6cd5128<\/p>\n

5.2.2\u57fa\u65bc\u898f\u5247\u7684\u523b\u8755\u6548\u61c9\u4fee\u6b63\u7684\u5c40\u9650\u6027129<\/p>\n

5.3\u57fa\u65bc\u6a21\u578b\u7684\u523b\u8755\u6548\u61c9\u4fee\u6b63132<\/p>\n

5.3.1\u523b\u8755\u5de5\u85dd\u5efa\u6a21132<\/p>\n

5.3.2\u57fa\u65bc\u6a21\u578b\u7684\u523b\u8755\u6548\u61c9\u4fee\u6b63\u6982\u8ff0134<\/p>\n

5.3.3\u523b\u8755\u6a21\u578b\u7684\u5c40\u9650\u6027135<\/p>\n

5.4 EPC\u4fee\u6b63\u7b56\u7565136<\/p>\n

5.5\u975e\u50b3\u7d71\u7684\u523b\u8755\u6548\u61c9\u4fee\u6b63\u6d41\u7a0b139<\/p>\n

5.5.1\u65b0\u7684MBRT\u523b\u8755\u6548\u61c9\u4fee\u6b63\u6d41\u7a0b139<\/p>\n

5.5.2\u523b\u8755\u6548\u61c9\u4fee\u6b63\u548c\u5149\u523b\u89e3\u6c7a\u65b9\u6848\u7684\u5171\u512a\u5316139<\/p>\n

5.6\u57fa\u65bc\u6a5f\u5668\u5b78\u7fd2\u7684\u523b\u8755\u6548\u61c9\u4fee\u6b63140<\/p>\n

5.6.1\u57fa\u65bc\u4eba\u5de5\u795e\u7d93\u7db2\u8def\u7684\u523b\u8755\u504f\u5dee\u9810\u6e2c140<\/p>\n

5.6.2\u523b\u8755\u9130\u8fd1\u6548\u61c9\u4fee\u6b63\u7b97\u704b141<\/p>\n

5.6.3\u57fa\u65bc\u6a5f\u5668\u5b78\u7fd2\u7684\u523b\u8755\u504f\u5dee\u9810\u6e2c\u6a21\u578b\u6848\u4f8b142<\/p>\n

\u672c\u7ae0\u53c3\u8003\u6587\u737b143<\/p>\n

\u7b2c6\u7ae0\u53ef\u88fd\u9020\u6027\u8a2d\u8a08145<\/p>\n

6.1 DFM\u7684\u5167\u6db5\u548c\u5916\u5ef6145<\/p>\n

6.1.1 DFM\u7684\u5167\u6db5145<\/p>\n

6.1.2 DFM\u7684\u5916\u5ef6148<\/p>\n

6.2\u589e\u5f3a\u7248\u5716\u7684\u5065\u58ef\u6027149<\/p>\n

6.2.1\u95dc\u9375\u5340\u57df\u5716\u5f62\u5206\u6790\uff08CAA\uff09149<\/p>\n

6.2.2\u589e\u5927\u63a5\u89f8\u7684\u53ef\u9760\u6027150<\/p>\n

6.2.3\u51cf\u5c11\u67f5\u6975\u9577\u5ea6\u548c\u5bec\u5ea6\u8b8a\u5316\u5c0d\u5668\u4ef6\u6548\u80fd\u7684\u5f71\u97ff151<\/p>\n

6.2.4\u7248\u5716\u5065\u58ef\u6027\u7684\u8a08\u5206\u6a21\u578b152<\/p>\n

6.3\u8207\u5149\u523b\u5de5\u85dd\u95dc\u806f\u7684DFM 153<\/p>\n

6.3.1\u4f7f\u7528\u5de5\u85dd\u8b8a\u5316\u7684\u983b\u5bec\uff08PV-band\uff09\u4f86\u8a55\u4f30\u7248\u5716\u7684\u53ef\u88fd\u9020\u6027153<\/p>\n

6.3.2\u4f7f\u7528\u805a\u96c6\u6df1\u5ea6\u4f86\u8a55\u4f30\u7248\u5716\u7684\u53ef\u88fd\u9020\u6027155<\/p>\n

6.3.3\u5149\u523b\u58de\u9ede\u7684\u8a08\u5206\u7cfb\u7d71\uff08scoring system\uff09157<\/p>\n

6.3.4\u5c0d\u5149\u523b\u5de5\u85dd\u53cb\u597d\u7684\u8a2d\u8a08160<\/p>\n

6.3.5\u7248\u5716\u8207\u63a9\u6a21\u4e00\u9ad4\u5316\u6a21\u64ec161<\/p>\n

6.4\u8207CMP\u5de5\u85dd\u95dc\u806f\u7684DFM 162<\/p>\n

6.4.1 CMP\u7684\u5de5\u85dd\u7f3a\u9677\u53ca\u5176\u6a21\u64ec162<\/p>\n

6.4.2\u5c0dCMP\u5de5\u85dd\u53cb\u597d\u7684\u7248\u5716\u8a2d\u8a08164<\/p>\n

6.4.3\u586b\u5145\u5197\u9918\u91d1\u5c6c\uff08dummy fill\uff09165<\/p>\n

6.4.4\u56de\u907f\u56f0\u96e3\u5716\u5f62165<\/p>\n

6.5 DFM\u7684\u767c\u5c55\u53ca\u5176\u8207\u8a2d\u8a08\u6d41\u7a0b\u7684\u7d50\u5408166<\/p>\n

6.5.1\u5168\u5de5\u85dd\u6d41\u7a0b\u7684DFM 166<\/p>\n

6.5.2 DFM\u5de5\u5177\u53ca\u5176\u8207\u8a2d\u8a08\u6d41\u7a0b\u7684\u7d50\u5408168<\/p>\n

6.6\u63d0\u9ad8\u5668\u4ef6\u53ef\u9760\u6027\u7684\u8a2d\u8a08\uff08DFR\uff09170<\/p>\n

6.6.1\u8207\u5668\u4ef6\u6548\u80fd\u76f8\u95dc\u7684DFR 170<\/p>\n

6.6.2\u8207\u9285\u4e92\u9023\u76f8\u95dc\u7684DFR 172<\/p>\n

6.7\u57fa\u65bc\u8a2d\u8a08\u7684\u91cf\u6e2c\u8207DFM\u7d50\u679c\u7684\u9a57\u8b49172<\/p>\n

6.7.1\u57fa\u65bc\u8a2d\u8a08\u7684\u91cf\u6e2c\uff08DBM\uff09172<\/p>\n

6.7.2 DFM\u898f\u5247\u6709\u6548\u6027\u7684\u8a55\u4f30174<\/p>\n

\u672c\u7ae0\u53c3\u8003\u6587\u737b174<\/p>\n

\u7b2c7\u7ae0\u8a2d\u8a08\u8207\u5de5\u85dd\u5354\u540c\u512a\u5316177<\/p>\n

7.1\u5de5\u85dd\u6d41\u7a0b\u5efa\u7acb\u904e\u7a0b\u4e2d\u7684DTCO 178<\/p>\n

7.1.1\u4e0d\u540c\u79d1\u6280\u7bc0\u9edeDTCO\u7684\u6f14\u9032178<\/p>\n

7.1.2\u5668\u4ef6\u7d50\u69cb\u63a2\u7d22181<\/p>\n

7.1.3\u8a2d\u8a08\u898f\u5247\u512a\u5316183<\/p>\n

7.1.4\u9762\u5411\u6a19\u6e96\u55ae\u5143\u5eab\u7684DTCO 194<\/p>\n

7.2\u8a2d\u8a08\u904e\u7a0b\u4e2d\u7684DTCO 201<\/p>\n

7.2.1\u8003\u616e\u8a2d\u8a08\u548c\u5de5\u85dd\u76f8\u95dc\u6027\u7684\u7269\u7406\u8a2d\u8a08\u65b9\u6cd5201<\/p>\n

7.2.2\u8003\u616e\u4f48\u7dda\u7684DTCO 205<\/p>\n

7.2.3\u6d41\u7247\u4e4b\u524d\u7684DTCO 213<\/p>\n

7.3\u57fa\u65bc\u7248\u5716\u7684\u826f\u7387\u5206\u6790\u53ca\u58de\u9ede\u6aa2\u6e2c\u7684DTCO 216<\/p>\n

7.3.1\u5f71\u97ff\u826f\u7387\u7684\u95dc\u9375\u5716\u5f62\u7684\u6aa2\u6e2c217<\/p>\n

7.3.2\u57fa\u65bc\u7248\u5716\u7684\u58de\u9ede\u6aa2\u6e2c222<\/p>\n

\u672c\u7ae0\u53c3\u8003\u6587\u737b226<\/p>\n

\u9644\u9304A\u5c08\u696d\u8a5e\u8a9e\u6aa2\u7d22229<\/p>\n

\u66f8\u6458\u63d2\u756b<\/span><\/strong><\/span><\/strong><\/p>\n

\"\u6625\u8282.jpg\"<\/p>\n

<\/span><\/strong><\/span><\/strong><\/p>\n

<\/span><\/span><\/strong><\/p>\n","protected":false},"excerpt":{"rendered":"

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