<\/p>\n
\u3010\u7d0d\u7c73\u96c6\u6210\u96fb\u8defFinFET\u5668\u4ef6\u7269\u7406\u8207\u6a21\u578b\u3011 \u7de8\u8f2f\u63a8\u85a6<\/span><\/strong><\/p>\n \u9069\u8b80\u4eba\u7fa4 \uff1a\u534a\u5c0e\u9ad4\u8207\u96c6\u6210\u96fb\u8def\u9818\u57df\u5de5\u7a0b\u6280\u8853\u4eba\u54e1\uff0c\u5fae\u96fb\u5b50\u3001\u96c6\u6210\u96fb\u8def\u3001\u96fb\u5b50\u6280\u8853\u7b49\u5c08\u696d\u5b78\u751f<\/p>\n 1\uff09\u4f5c\u8005\u70baIEEE\u6703\u58eb\u3001Prospicient Devices\u9996\u5e2d\u7814\u7a76\u79d1\u5b78\u5bb6\uff0c\u300a\u7d0d\u7c73\u96c6\u6210\u96fb\u8defFinFET\u5668\u4ef6\u7269\u7406\u8207\u6a21\u578b\u300b\u662f\u4f5c\u800530\u591a\u5e74\u5de5\u696d\u7d93\u9a57\u548c20\u591a\u5e74\u6559\u5b78\u7d93\u9a57\u7684\u7d50\u6676\u3002<\/p>\n 2\uff09\u82af\u7247\u88fd\u9020\u7d93\u5178\u8457\u4f5c\uff0cFinFET\u662f\u7e7c\u7e8c\u7e2e\u5c0f\u548c\u88fd\u9020\u96c6\u6210\u96fb\u8def\u7684\u9996*xuan\u5668\u4ef6\u3002<\/p>\n 3\uff09\u300a\u7d0d\u7c73\u96c6\u6210\u96fb\u8defFinFET\u5668\u4ef6\u7269\u7406\u8207\u6a21\u578b\u300b\u4ecb\u7d39\u4e86FinFET\u5668\u4ef6\u548c\u6280\u8853\u7684\u57fa\u672c\u7406\u8ad6\u548c\u5de5\u4f5c\u539f\u7406\uff0c\u6982\u8ff0\u4e86FinFET\u5668\u4ef6\u7d50\u69cb\u548c\u88fd\u9020\u5de5\u85dd\uff0c\u4e26\u7d66\u51fa\u4e86\u7528\u65bc\u96c6\u6210\u96fb\u8def\u8a2d\u8a08\u548c\u88fd\u9020\u7684FinFET\u5668\u4ef6\u7279\u6027\u7684\u8a73\u7d30\u516c\u5f0f\u3002<\/p>\n 4\uff09\u300a\u7d0d\u7c73\u96c6\u6210\u96fb\u8defFinFET\u5668\u4ef6\u7269\u7406\u8207\u6a21\u578b\u300b\u5167\u5bb9\u8a73\u5be6\uff0c\u5668\u4ef6\u7269\u7406\u6982\u5ff5\u6e05\u6670\uff0c\u6578\u5b78\u63a8\u5c0e\u8a73\u76e1\u56b4\u8b39\uff0c\u5373\u4f7f\u4e0d\u592a\u719f\u6089\u534a\u5c0e\u9ad4\u7269\u7406\u7684\u4eba\u54e1\u4e5f\u80fd\u8f15\u6613\u7406\u89e3FinFET\u6982\u5ff5\u3002<\/p>\n \u5167\u5bb9\u7c21\u4ecb<\/span><\/strong><\/p>\n \u96c6\u6210\u96fb\u8def\u5df2\u9032\u5165\u7d0d\u7c73\u4e16\u4ee3\uff0c\u70ba\u4e86\u61c9\u5c0d\u96c6\u6210\u96fb\u8def\u6301\u7e8c\u7e2e\u5c0f\u9762\u81e8\u7684\u6311\u6230\uff0c\u9c2d\u5f0f\u5834\u6548\u61c9\u6676\u9ad4\u7ba1\uff08FinFET\uff09\u61c9\u904b\u800c\u751f\uff0c\u5b83\u662f\u7e7c\u7e8c\u7e2e\u5c0f\u548c\u88fd\u9020\u96c6\u6210\u96fb\u8def\u7684\u6709\u6548\u66ff\u4ee3\u65b9\u6848\u3002 \u300a\u7d0d\u7c73\u96c6\u6210\u96fb\u8defFinFET\u5668\u4ef6\u7269\u7406\u8207\u6a21\u578b\u300b\u8b1b\u89e3FinFET\u5668\u4ef6\u96fb\u5b50\u5b78\uff0c\u4ecb\u7d39FinFET\u5668\u4ef6\u7684\u7d50\u69cb\u3001\u5de5\u4f5c\u539f\u7406\u548c\u6a21\u578b\u7b49\u3002<\/p>\n \u300a\u7d0d\u7c73\u96c6\u6210\u96fb\u8defFinFET\u5668\u4ef6\u7269\u7406\u8207\u6a21\u578b\u300b\u4e3b\u8981\u5167\u5bb9\u6709\uff1a\u4e3b\u6d41MOSFET\u572822nm\u7bc0\u9ede\u4ee5\u4e0b\u7531\u65bc\u77ed\u6e9d\u9053\u6548\u61c9\u6240\u5e36\u4f86\u7684\u7e2e\u5c0f\u9650\u5236\u6982\u8ff0\uff1b\u57fa\u672c\u534a\u5c0e\u9ad4\u96fb\u5b50\u5b78\u548cpn\u7d50\u5de5\u4f5c\u539f\u7406\uff1b\u591a\u67f5MOS\u96fb\u5bb9\u5668\u7cfb\u7d71\u7684\u57fa\u672c\u7d50\u69cb\u548c\u5de5\u4f5c\u539f\u7406\uff1b\u975e\u5e73\u9762CMOS\u5de5\u85dd\u4e2d\u7684FinFET\u5668\u4ef6\u7d50\u69cb\u548c\u5de5\u85dd\u6280\u8853\uff1bFinFET\u57fa\u672c\u7406\u8ad6\uff1bFinFET\u5c0f\u5c3a\u5bf8\u6548\u61c9\uff1bFinFET\u6d29\u6f0f\u96fb\u6d41\uff1bFinFET\u5bc4\u751f\u96fb\u963b\u548c\u5bc4\u751f\u96fb\u5bb9\uff1bFinFET\u5de5\u85dd\u3001\u5668\u4ef6\u548c\u96fb\u8def\u8a2d\u8a08\u9762\u81e8\u7684\u4e3b\u8981\u6311\u6230\uff1bFinFET\u5668\u4ef6\u7dca\u6e4a\u6a21\u578b\u3002<\/p>\n \u300a\u7d0d\u7c73\u96c6\u6210\u96fb\u8defFinFET\u5668\u4ef6\u7269\u7406\u8207\u6a21\u578b\u300b\u5167\u5bb9\u8a73\u5be6\uff0c\u5668\u4ef6\u7269\u7406\u6982\u5ff5\u6e05\u6670\uff0c\u6578\u5b78\u63a8\u5c0e\u8a73\u76e1\u56b4\u8b39\u3002 \u300a\u7d0d\u7c73\u96c6\u6210\u96fb\u8defFinFET\u5668\u4ef6\u7269\u7406\u8207\u6a21\u578b\u300b\u53ef\u4f5c\u70ba\u9ad8\u7b49\u9662\u6821\u5fae\u96fb\u5b50\u5b78\u8207\u56fa\u9ad4\u96fb\u5b50\u5b78\u3001\u96fb\u5b50\u79d1\u5b78\u8207\u6280\u8853\u3001\u96c6\u6210\u96fb\u8def\u79d1\u5b78\u8207\u5de5\u7a0b\u7b49\u5c08\u696d\u7684\u9ad8\u5e74\u7d1a\u672c\u79d1\u751f\u548c\u7814\u7a76\u751f\u7684\u6559\u6750\u548c\u53c3\u8003\u66f8\uff0c\u4e5f\u53ef\u4f9b\u76f8\u95dc\u9818\u57df\u7684\u5de5\u7a0b\u6280\u8853\u4eba\u54e1\u53c3\u8003\u3002<\/p>\n \u4f5c\u8005\u7c21\u4ecb<\/span><\/strong><\/p>\n \u85a9\u99ac\u00b7K.\u85a9\u54c8\uff08Samar K.Saha\uff09\u5f9e\u5370\u5ea6Gauhati\u5927\u5b78\u7372\u5f97\u7269\u7406\u5b78\u535a\u58eb\u5b78\u4f4d\uff0c\u5728\u7f8e\u570b\u65af\u5766\u798f\u5927\u5b78\u7372\u5f97\u5de5\u7a0b\u7ba1\u7406\u78a9\u58eb\u5b78\u4f4d\u3002\u76ee\u524d\uff0c\u4ed6\u662f\u52a0\u5229\u798f\u5c3c\u4e9e\u5dde\u8056\u5854\u514b\u62c9\u62c9\u5927\u5b78\u96fb\u6c23\u5de5\u7a0b\u7cfb\u7684\u517c\u8077\u6559\u6388\uff0c\u4e5f\u662fPros-picient Devices\u7684\u9996\u5e2d\u7814\u7a76\u79d1\u5b78\u5bb6\u3002\u81ea1984\u5e74\u4ee5\u4f86\uff0c\u4ed6\u5728\u7f8e\u570b\u570b\u5bb6\u534a\u5c0e\u9ad4\u3001LSI\u908f\u8f2f\u3001\u5fb7\u5dde\u5100\u5668\u3001\u98db\u5229\u6d66\u534a\u5c0e\u9ad4\u3001Silicon Storage Technology\u3001\u65b0\u601d\u3001DSM Solutions\u3001Silterra USA\u548cSu-Volta\u64d4\u4efb\u5404\u7a2e\u6280\u8853\u548c\u7ba1\u7406\u8077\u4f4d\u3002\u4ed6\u9084\u66fe\u5728\u5357\u4f0a\u5229\u8afe\u4f0a\u5927\u5b78\u5361\u672c\u4ee3\u723e\u5206\u6821\u3001\u5967\u672c\u5927\u5b78\u3001\u5167\u83ef\u9054\u5927\u5b78\u62c9\u65af\u7dad\u52a0\u65af\u5206\u6821\u4ee5\u53ca\u79d1\u7f85\u62c9\u591a\u5927\u5b78\u79d1\u7f85\u62c9\u591a\u6cc9\u5206\u6821\u64d4\u4efb\u6559\u54e1\u3002\u4ed6\u64b0\u5beb\u4e86100\u591a\u7bc7\u7814\u7a76\u8ad6\u6587\u3002\u4ed6\u9084\u64b0\u5beb\u4e86\u4e00\u672c\u66f8Compact Models for Integrated Circuit Design: Conventional Transistors and Beyond\uff08CRC\u51fa\u7248\u793e\uff0c2015\u5e74\uff09\uff1b\u64b0\u5beb\u4e86\u95dc\u65bcTCAD\u7684\u66f8Technology Computer Aided Design: Simulation for VLSI MOSFET\uff08C.K.Sarkar\u4e3b\u7de8\uff0cCRC\u51fa\u7248\u793e\uff0c2013\u5e74\uff09\u4e2d\u7684\u4e00\u7ae0\u201cIntroduction to Technology Computer-Aided Design\u201d\uff1b\u64c1\u670912\u9805\u7f8e\u570b\u5c08\u5229\u3002\u4ed6\u7684\u7814\u7a76\u8208\u8da3\u5305\u62ec\u7d0d\u7c73\u5668\u4ef6\u548c\u5de5\u85dd\u9ad4\u7cfb\u7d50\u69cb\u3001TCAD\u3001\u7dca\u6e4a\u578b\u5efa\u6a21\u3001\u53ef\u518d\u751f\u80fd\u6e90\u5668\u4ef6\u3001TCAD\u548c\u7814\u767c\u7ba1\u7406\u3002<\/p>\n Saha\u535a\u58eb\u66fe\u64d4\u4efb\u7f8e\u570b\u96fb\u6c23\u96fb\u5b50\u5de5\u7a0b\u5e2b\u5b78\u6703\uff08IEEE\uff09\u96fb\u5b50\u5668\u4ef6\u5206\u6703\uff08EDS\uff092016\uff5e2017\u5e74\u6703\u9577\uff0c\u76ee\u524d\u64d4\u4efbEDS\u9ad8\u7d1a\u524d\u4efb\u6703\u9577\u3001J.J.Ebers\u734e\u59d4\u54e1\u6703\u4e3b\u5e2d\u548cEDS\u8a55\u5be9\u59d4\u54e1\u6703\u4e3b\u5e2d\u3002\u4ed6\u662f\u7f8e\u570b\u96fb\u6c23\u96fb\u5b50\u5de5\u7a0b\u5e2b\u5b78\u6703\uff08IEEE\uff09\u6703\u58eb\u3001\u82f1\u570b\u5de5\u7a0b\u6280\u8853\u5b78\u6703\uff08IET\uff09\u6703\u58eb\u3001IEEEEDS\u5091\u51fa\u8b1b\u5e2b\u3002\u6b64\u524d\uff0c\u4ed6\u66fe\u64d4\u4efbEDS\u7684\u524d\u4efb\u521d\u7d1a\u6703\u9577\uff1bEDS\u9812\u734e\u4e3b\u5e2d\uff1bEDS\u8a55\u5be9\u59d4\u54e1\u6703\u6210\u54e1\uff1bEDS\u7576\u9078\u6703\u9577\uff1bEDS\u51fa\u7248\u90e8\u526f\u7e3d\u88c1\uff1bEDS\u7406\u4e8b\u6703\u7684\u7576\u9078\u6210\u54e1\uff1bIEEEQuestEDS\u4e3b\u7de8\uff1bEDS George Smith\u548cPaul Rappaport\u734e\u4e3b\u5e2d\uff1b5\u5340\u548c6\u5340EDS\u901a\u8a0a\u7de8\u8f2f\uff1bEDS\u7dca\u6e4a\u6a21\u578b\u6280\u8853\u59d4\u54e1\u6703\u4e3b\u5e2d\uff1bEDS\u5317\u7f8e\u897f\u90e8\u5340\u57df\/\u5206\u6703\u5c0f\u7d44\u59d4\u54e1\u6703\u4e3b\u5e2d\uff1bIEEE\u6703\u8b70\u51fa\u7248\u59d4\u54e1\u6703\u6210\u54e1\uff1bIEEETAB\u671f\u520a\u59d4\u54e1\u6703\u6210\u54e1\uff1b\u8056\u514b\u62c9\u62c9\u8c37\u820a\u91d1\u5c71EDS\u5206\u6703\u8ca1\u52d9\u4e3b\u7ba1\u3001\u526f\u4e3b\u5e2d\u3001\u4e3b\u5e2d\u3002<\/p>\n \u76ee\u9304<\/span><\/strong><\/p>\n \u8b6f\u8005\u5e8f<\/p>\n \u524d\u8a00<\/p>\n \u4f5c\u8005\u7c21\u4ecb<\/p>\n \u7b2c1\u7ae0 \u6982\u8ff0<\/p>\n 1.1 \u9c2d\u5f0f\u5834\u6548\u61c9\u6676\u9ad4\u7ba1\uff08FinFET\uff09<\/p>\n 1.2 \u96c6\u6210\u96fb\u8def\u88fd\u9020\u4e2d\u7684MOSFET\u5668\u4ef6\u6982\u6cc1<\/p>\n 1.2.1 \u7d0d\u7c73\u7d1aMOSFET\u7e2e\u5c0f\u7684\u6311\u6230<\/p>\n 1.2.1.1 \u77ed\u6e9d\u9053MOSFET\u4e2d\u7684\u6d29\u6f0f\u96fb\u6d41<\/p>\n 1.2.1.2 MOSFET\u6027\u80fd\u6ce2\u52d5<\/p>\n 1.2.2 MOSFET\u7e2e\u5c0f\u96e3\u984c\u7684\u7269\u7406\u6a5f\u7406<\/p>\n 1.3 \u66ff\u4ee3\u5668\u4ef6\u6982\u5ff5<\/p>\n 1.3.1 \u7121\u647b\u96dc\u6216\u8f15\u647b\u96dc\u6e9d\u9053MOSFET<\/p>\n 1.3.1.1 \u6df1\u8017\u76e1\u6e9d\u9053MOSFET<\/p>\n 1.3.1.2 \u57cb\u6688MOSFET<\/p>\n 1.3.2 \u8584\u9ad4\u5834\u6548\u61c9\u6676\u9ad4\u7ba1<\/p>\n 1.3.2.1 \u55ae\u67f5\u8d85\u8584\u9ad4\u5834\u6548\u61c9\u6676\u9ad4\u7ba1<\/p>\n 1.3.2.2 \u591a\u67f5\u5834\u6548\u61c9\u6676\u9ad4\u7ba1<\/p>\n 1.4 VLSI\u96fb\u8def\u548c\u7cfb\u7d71\u4e2d\u7684FinFET\u5668\u4ef6<\/p>\n 1.5 FinFET\u5668\u4ef6\u7c21\u53f2<\/p>\n 1.6 \u5c0f\u7d50<\/p>\n \u53c3\u8003\u6587\u737b<\/p>\n \u7b2c2\u7ae0 \u534a\u5c0e\u9ad4\u7269\u7406\u57fa\u790e<\/p>\n 2.1 \u7c21\u4ecb<\/p>\n 2.2 \u534a\u5c0e\u9ad4\u7269\u7406<\/p>\n 2.2.1 \u80fd\u5e36\u6a21\u578b<\/p>\n 2.2.2 \u8f09\u6d41\u5b50\u7d71\u8a08<\/p>\n 2.2.3 \u672c\u5fb5\u534a\u5c0e\u9ad4<\/p>\n 2.2.3.1 \u672c\u5fb5\u8f09\u6d41\u5b50\u6fc3\u5ea6<\/p>\n 2.2.3.2 \u96fb\u5b50\u548c\u7a7a\u7a74\u7684\u6709\u6548\u8cea\u91cf<\/p>\n 2.2.4 \u975e\u672c\u5fb5\u534a\u5c0e\u9ad4<\/p>\n 2.2.4.1 \u975e\u672c\u5fb5\u534a\u5c0e\u9ad4\u4e2d\u7684\u8cbb\u7c73\u80fd\u7d1a<\/p>\n 2.2.4.2 \u7c21\u4f75\u647b\u96dc\u534a\u5c0e\u9ad4\u4e2d\u7684\u8cbb\u7c73\u80fd\u7d1a<\/p>\n 2.2.4.3 \u534a\u5c0e\u9ad4\u4e2d\u7684\u975c\u96fb\u52e2\u548c\u8f09\u6d41\u5b50\u6fc3\u5ea6<\/p>\n 2.2.4.4 \u6e96\u8cbb\u7c73\u80fd\u7d1a<\/p>\n 2.2.5 \u534a\u5c0e\u9ad4\u4e2d\u7684\u8f09\u6d41\u5b50\u8f38\u904b<\/p>\n 2.2.5.1 \u8f09\u6d41\u5b50\u6f02\u79fb\uff1a\u8f09\u6d41\u5b50\u5728\u96fb\u5834\u4e2d\u7684\u904b\u52d5<\/p>\n 2.2.5.2 \u8f09\u6d41\u5b50\u64f4\u6563<\/p>\n 2.2.6 \u8f09\u6d41\u5b50\u7684\u7522\u751f-\u8907\u5408<\/p>\n 2.2.6.1 \u6ce8\u5165\u6c34\u5e73<\/p>\n 2.2.6.2 \u8907\u5408\u904e\u7a0b<\/p>\n 2.2.7 \u534a\u5c0e\u9ad4\u57fa\u672c\u65b9\u7a0b<\/p>\n 2.2.7.1 \u6cca\u677e\u65b9\u7a0b<\/p>\n 2.2.7.2 \u50b3\u8f38\u65b9\u7a0b<\/p>\n 2.2.7.3 \u9023\u7e8c\u6027\u65b9\u7a0b<\/p>\n 2.3 n\u578b\u548cp\u578b\u534a\u5c0e\u9ad4\u63a5\u89f8\u7406\u8ad6<\/p>\n 2.3.1 pn\u7d50\u7684\u57fa\u672c\u7279\u5fb5<\/p>\n 2.3.2 \u5167\u5efa\u96fb\u52e2\u5dee<\/p>\n 2.3.3 \u7a81\u8b8a\u7d50<\/p>\n 2.3.3.1 \u975c\u96fb\u5b78<\/p>\n 2.3.4 \u5916\u52a0\u504f\u58d3\u4e0b\u7684pn\u7d50<\/p>\n 2.3.4.1 \u55ae\u908a\u7a81\u8b8a\u7d50<\/p>\n 2.3.5 pn\u7d50\u4e0a\u7684\u8f09\u6d41\u5b50\u8f38\u904b<\/p>\n 2.3.5.1 \u5c11\u6578\u8f09\u6d41\u5b50\u6fc3\u5ea6\u8207\u7d50\u96fb\u52e2\u7684\u95dc\u4fc2<\/p>\n 2.3.6 pn\u7d50I-V\u7279\u6027<\/p>\n 2.3.6.1 pn\u7d50\u6d29\u6f0f\u96fb\u6d41\u7684\u6eab\u5ea6\u4f9d\u8cf4\u6027<\/p>\n 2.3.6.2 pn\u7d50\u96fb\u6d41\u65b9\u7a0b\u7684\u5c40\u9650\u6027<\/p>\n 2.3.6.3 \u9ad4\u96fb\u963b<\/p>\n 2.3.6.4 \u7d50\u64ca\u7a7f\u96fb\u58d3<\/p>\n 2.3.7 pn\u7d50\u52d5\u614b\u7279\u6027<\/p>\n 2.3.7.1 \u7d50\u96fb\u5bb9<\/p>\n 2.3.7.2 \u64f4\u6563\u96fb\u5bb9<\/p>\n 2.3.7.3 \u5c0f\u4fe1\u865f\u96fb\u5c0e<\/p>\n 2.3.8 pn\u7d50\u7b49\u6548\u96fb\u8def<\/p>\n 2.4 \u5c0f\u7d50<\/p>\n \u53c3\u8003\u6587\u737b<\/p>\n \u7b2c3\u7ae0 \u591a\u67f5\u91d1\u5c6c-\u6c27\u5316\u7269-\u534a\u5c0e\u9ad4\uff08MOS\uff09\u7cfb\u7d71<\/p>\n 3.1 \u7c21\u4ecb<\/p>\n 3.2 \u5e73\u8861\u614b\u4e0b\u591a\u67f5MOS\u96fb\u5bb9\u5668<\/p>\n 3.2.1 \u5b64\u7acb\u7684\u91d1\u5c6c\u3001\u6c27\u5316\u7269\u548c\u534a\u5c0e\u9ad4\u6750\u6599\u7684\u7279\u6027<\/p>\n 3.2.1.1 \u529f\u51fd\u6578<\/p>\n 3.2.2 \u63a5\u89f8\u5f62\u6210MOS\u7cfb\u7d71\u4e2d\u7684\u91d1\u5c6c\u3001\u6c27\u5316\u7269\u548c\u534a\u5c0e\u9ad4\u6750\u6599<\/p>\n 3.2.2.1 \u91d1\u5c6c\u67f5\u529f\u51fd\u6578\u4f4d\u65bc\u77fd\u5e36\u9699\u908a\u7de3\u7684MOS\u7cfb\u7d71<\/p>\n 3.2.2.2 \u91d1\u5c6c\u67f5\u529f\u51fd\u6578\u4f4d\u65bc\u77fd\u5e36\u9699\u4e2d\u592e\u7684MOS\u7cfb\u7d71<\/p>\n 3.2.3 \u6c27\u5316\u5c64\u96fb\u8377<\/p>\n 3.2.3.1 \u754c\u9762\u9677\u9631\u96fb\u8377<\/p>\n 3.2.3.2 \u56fa\u5b9a\u6c27\u5316\u5c64\u96fb\u8377<\/p>\n 3.2.3.3 \u6c27\u5316\u5c64\u9677\u9631\u96fb\u8377<\/p>\n 3.2.3.4 \u53ef\u52d5\u96e2\u5b50\u96fb\u8377<\/p>\n 3.2.4 \u6c27\u5316\u5c64\u96fb\u8377\u5c0d\u80fd\u5e36\u7d50\u69cb\u7684\u5f71\u97ff\uff1a\u5e73\u5e36\u96fb\u58d3<\/p>\n 3.2.5 \u8868\u9762\u52e2<\/p>\n 3.3 \u5916\u52a0\u504f\u58d3\u4e0b\u7684MOS\u96fb\u5bb9\u5668<\/p>\n 3.3.1 \u7a4d\u7d2f<\/p>\n 3.3.2 \u8017\u76e1<\/p>\n 3.3.3 \u53cd\u578b<\/p>\n 3.4 \u591a\u67f5MOS\u96fb\u5bb9\u5668\u7cfb\u7d71\uff1a\u6578\u5b78\u5206\u6790<\/p>\n 3.4.1 \u6cca\u677e\u65b9\u7a0b<\/p>\n 3.4.2 \u975c\u96fb\u52e2\u548c\u96fb\u8377\u5206\u4f48<\/p>\n 3.4.2.1 \u534a\u5c0e\u9ad4\u4e2d\u7684\u611f\u751f\u96fb\u8377<\/p>\n 3.4.2.2 \u8868\u9762\u52e2\u516c\u5f0f<\/p>\n 3.4.2.3 \u95be\u503c\u96fb\u58d3<\/p>\n 3.4.2.4 \u8868\u9762\u52e2\u51fd\u6578<\/p>\n 3.4.2.5 \u53cd\u578b\u96fb\u8377\u5bc6\u5ea6\u7684\u7d71\u4e00\u8868\u9054\u5f0f<\/p>\n 3.5 \u91cf\u5b50\u529b\u5b78\u6548\u61c9<\/p>\n 3.6 \u5c0f\u7d50<\/p>\n \u53c3\u8003\u6587\u737b<\/p>\n \u7b2c4\u7ae0 FinFET\u5668\u4ef6\u5de5\u85dd\u6982\u8ff0<\/p>\n 4.1 \u7c21\u4ecb<\/p>\n 4.2 FinFET\u88fd\u9020\u5de5\u85dd<\/p>\n 4.3 \u9ad4FinFET\u88fd\u9020<\/p>\n 4.3.1 \u8d77\u59cb\u6750\u6599<\/p>\n 4.3.2 \u9631\u7684\u5f62\u6210<\/p>\n 4.3.2.1 p\u9631\u7684\u5f62\u6210<\/p>\n 4.3.2.2 n\u9631\u7684\u5f62\u6210<\/p>\n 4.3.3 Fin\u5716\u5f62\u5316\uff1a\u9593\u9694\u5c64\u523b\u8755\u6280\u8853<\/p>\n 4.3.3.1 \u82af\u8ef8\u5716\u5f62\u5316<\/p>\n 4.3.3.2 \u6c27\u5316\u7269\u9593\u9694\u5c64\u5f62\u6210<\/p>\n 4.3.3.3 \u77fdFin\u5f62\u6210<\/p>\n 4.3.4 \u975e\u50b3\u7d71\u7684\u9631\u5f62\u6210\u5de5\u85dd<\/p>\n 4.3.5 \u67f5\u6975\u5b9a\u7fa9\uff1a\u591a\u6676\u77fddummy\u67f5\u5f62\u6210<\/p>\n 4.3.6 \u6e90\u6f0f\u5ef6\u4f38\u5de5\u85dd<\/p>\n 4.3.6.1 nFinFET\u6e90\u6f0f\u5ef6\u4f38\u5f62\u6210<\/p>\n 4.3.6.2 pFinFET\u6e90\u6f0f\u5ef6\u4f38\u5f62\u6210<\/p>\n 4.3.7 \u51f8\u8d77\u6e90\u6f0f\u5de5\u85dd<\/p>\n 4.3.7.1 SiGepFinFET\u51f8\u8d77\u6e90\u6f0f\u5f62\u6210<\/p>\n 4.3.7.2 SiCnFinFET\u51f8\u8d77\u6e90\u6f0f\u5f62\u6210<\/p>\n 4.3.7.3 \u51f8\u8d77\u6e90\u6f0f\u77fd\u5316<\/p>\n 4.3.8 \u66ff\u4ee3\u91d1\u5c6c\u67f5\u5f62\u6210<\/p>\n 4.3.8.1 \u591a\u6676\u77fddummy\u67f5\u53bb\u9664<\/p>\n 4.3.8.2 \u9ad8k\u67f5\u4ecb\u8cea\u6fb1\u7a4d<\/p>\n 4.3.8.3 \u91d1\u5c6c\u67f5\u5f62\u6210<\/p>\n 4.3.9 \u81ea\u5c0d\u6e96\u63a5\u89f8\u5f62\u6210<\/p>\n 4.3.9.1 \u91d1\u5c6c\u5316<\/p>\n 4.4 SOI-FinFET\u5de5\u85dd\u6d41\u7a0b<\/p>\n 4.4.1 \u8d77\u59cb\u6750\u6599<\/p>\n 4.4.2 Fin\u5716\u5f62\u5316\uff1a\u9593\u9694\u5c64\u523b\u8755\u6280\u8853<\/p>\n 4.4.2.1 \u82af\u8ef8\u5716\u5f62\u5316<\/p>\n 4.4.2.2 \u6c27\u5316\u7269\u9593\u9694\u5c64\u5f62\u6210<\/p>\n 4.4.2.3 \u77fdFin\u5f62\u6210<\/p>\n 4.4.3 \u9ad4\u77fdFinFET\u8207SOI-FinFET\u88fd\u9020\u5de5\u85dd\u6bd4\u8f03<\/p>\n 4.5 \u5c0f\u7d50<\/p>\n \u53c3\u8003\u6587\u737b<\/p>\n \u7b2c5\u7ae0 \u5927\u5c3a\u5bf8FinFET\u5668\u4ef6\u5de5\u4f5c\u539f\u7406<\/p>\n 5.1 \u7c21\u4ecb<\/p>\n 5.2 FinFET\u5668\u4ef6\u7684\u57fa\u672c\u7279\u5fb5<\/p>\n 5.3 FinFET\u5668\u4ef6\u5de5\u4f5c<\/p>\n 5.4 \u6f0f\u6975\u96fb\u6d41\u516c\u5f0f<\/p>\n 5.4.1 \u975c\u96fb\u52e2\u7684\u63a8\u5c0e<\/p>\n 5.4.2 \u5c0d\u7a31DG-FinFET\u7684\u9023\u7e8c\u6f0f\u6975\u96fb\u6d41\u65b9\u7a0b<\/p>\n 5.4.3 \u5c0d\u7a31DG-FinFET\u7684\u5340\u57df\u6f0f\u6975\u96fb\u6d41\u516c\u5f0f<\/p>\n 5.4.3.1 \u95be\u503c\u96fb\u58d3\u516c\u5f0f<\/p>\n 5.4.3.2 \u7dda\u6027\u5340Ids\u65b9\u7a0b<\/p>\n 5.4.3.3 \u98fd<\/p>\n \u66f8\u6458\u63d2\u756b<\/span><\/strong><\/p>\n ————————————————————————————-<\/p>\n \u3010\u6c2e\u5316\u93b5\u529f\u7387\u6676\u9ad4\u7ba1 \u5668\u4ef6\u3001\u96fb\u8def\u8207\u61c9\u7528\uff08\u539f\u66f8\u7b2c3\u7248\uff09\u3011 \u7de8\u8f2f\u63a8\u85a6<\/span><\/strong><\/p>\n \u9069\u8b80\u4eba\u7fa4 \uff1a\u529f\u7387\u534a\u5c0e\u9ad4\u6280\u8853\u7814\u7a76\u7684\u79d1\u7814\u5de5\u4f5c\u8005\u3001\u5de5\u7a0b\u5e2b\uff0c\u9ad8\u7b49\u9662\u6821\u5fae\u96fb\u5b50\u79d1\u5b78\u8207\u5de5\u7a0b\u3001\u96c6\u6210\u96fb\u8def\u79d1\u5b78\u8207\u5de5\u7a0b\u3001\u96fb\u529b\u96fb\u5b50\u6280\u8853\u5c08\u696d\u5e2b\u751f<\/p>\n 1\uff09\u7f8e\u570bEPC\u516c\u53f8CEO\u3001\u570b\u969b\u6574\u6d41\u5668\u516c\u53f8\u539fCEO\u8457\u4f5c\uff0c\u5168\u5f69\u8272\u5370\u5237\uff0c\u7406\u89e3GaN\u6676\u9ad4\u7ba1\u7d50\u69cb\u3001\u7279\u6027\u548c\u61c9\u7528\u7684\u5be6\u7528\u6307\u5357\u3002<\/p>\n 2\uff09\u7cfb\u7d71\u5168\u9762\u4ecb\u7d39\u6c2e\u5316\u93b5\uff08GaN\uff09\u6280\u8853\u53ca\u5176\u61c9\u7528\u7684\u7d93\u5178\u8457\u4f5c\uff0c\u7372\u5f97\u4e86\u570b\u969b\u4e0a\u773e\u591a\u77e5\u540d\u5c08\u5bb6\u7684\u63a8\u85a6\u3002<\/p>\n 3\uff09\u7b2c3\u7248\u66f4\u65b0\u4e8635%\u7684\u5167\u5bb9\uff0c\u5305\u62ec\u6563\u71b1\u7ba1\u7406\u3001\u591a\u96fb\u5e73\u8b8a\u63db\u5668\u3001\u9ad8\u8ae7\u632f\u7121\u7dda\u96fb\u6e90\u548c\u6fc0\u5149\u96f7\u9054\u7b49\u65b0\u7ae0\u7bc0\u3002<\/p>\n 4\uff09\u5728\u4f7f\u7528GaN\u6676\u9ad4\u7ba1\u69cb\u5efa\u529f\u7387\u8b8a\u63db\u7cfb\u7d71\u6642\uff0c\u63d0\u4f9b\u4e86\u6709\u95dc\u7279\u5b9a\u96fb\u8def\u7684\u5be6\u7528\u8a2d\u8a08\u3002<\/p>\n 5\uff09\u9069\u5408\u5f9e\u4e8bGaN\u529f\u7387\u534a\u5c0e\u9ad4\u6280\u8853\u7814\u7a76\u7684\u79d1\u7814\u5de5\u4f5c\u8005\u3001\u5de5\u7a0b\u5e2b\u3001\u9ad8\u5e74\u7d1a\u672c\u79d1\u751f\u548c\u7814\u7a76\u751f\u4f7f\u7528\uff0c\u5c0d\u65bc\u5f9e\u4e8b\u5176\u4ed6\u529f\u7387\u534a\u5c0e\u9ad4\u6280\u8853\u7684\u7814\u7a76\u4e5f\u5177\u6709\u501f\u9452\u610f\u7fa9\u3002<\/p>\n \u5167\u5bb9\u7c21\u4ecb<\/span><\/strong><\/p>\n \u300a\u6c2e\u5316\u93b5\u529f\u7387\u6676\u9ad4\u7ba1\u2014\u2014\u5668\u4ef6\u3001\u96fb\u8def\u8207\u61c9\u7528\uff08\u539f\u66f8\u7b2c3\u7248\uff09\u300b\u517117\u7ae0\uff0c\u7b2c1\u7ae0\u6982\u8ff0\u4e86\u6c2e\u5316\u93b5\uff08GaN\uff09\u6280\u8853\uff1b\u7b2c2\u7ae0\u70baGaN\u6676\u9ad4\u7ba1\u7684\u5668\u4ef6\u7269\u7406\uff1b\u7b2c3\u7ae0\u4ecb\u7d39\u4e86GaN\u6676\u9ad4\u7ba1\u9a45\u52d5\u7279\u6027\uff1b\u7b2c4\u7ae0\u4ecb\u7d39\u4e86GaN\u6676\u9ad4\u7ba1\u96fb\u8def\u7684\u7248\u5716\u8a2d\u8a08\uff1b\u7b2c5\u7ae0\u8a0e\u8ad6\u4e86GaN\u6676\u9ad4\u7ba1\u7684\u5efa\u6a21\u548c\u6e2c\u91cf\uff1b\u7b2c6\u7ae0\u4ecb\u7d39\u4e86GaN\u6676\u9ad4\u7ba1\u7684\u6563\u71b1\u7ba1\u7406\uff1b\u7b2c7\u7ae0\u4ecb\u7d39\u4e86\u786c\u958b\u95dc\u6280\u8853\uff1b\u7b2c8\u7ae0\u4ecb\u7d39\u4e86\u8edf\u958b\u95dc\u6280\u8853\u548c\u8b8a\u63db\u5668\uff1b\u7b2c9\u7ae0\u4ecb\u7d39\u4e86GaN\u6676\u9ad4\u7ba1\u5c04\u983b\u6027\u80fd\uff1b\u7b2c10\u7ae0\u4ecb\u7d39\u4e86DC-DC\u529f\u7387\u8b8a\u63db\uff1b\u7b2c11\u7ae0\u8a0e\u8ad6\u4e86\u591a\u96fb\u5e73\u8b8a\u63db\u5668\u8a2d\u8a08\uff1b\u7b2c12\u7ae0\u4ecb\u7d39\u4e86D\u985e\u97f3\u983b\u653e\u5927\u5668\uff1b\u7b2c13\u7ae0\u4ecb\u7d39\u4e86GaN\u6676\u9ad4\u7ba1\u5728\u6fc0\u5149\u96f7\u9054\u65b9\u9762\u7684\u61c9\u7528\uff1b\u7b2c14\u7ae0\u4ecb\u7d39\u4e86\u5305\u7d61\u8ddf\u8e2a\u6280\u8853\uff1b\u7b2c15\u7ae0\u8a0e\u8ad6\u4e86\u9ad8\u8ae7\u632f\u7121\u7dda\u96fb\u6e90\uff1b\u7b2c16\u7ae0\u8a0e\u8ad6\u4e86GaN\u6676\u9ad4\u7ba1\u7684\u7a7a\u9593\u61c9\u7528\uff1b\u7b2c17\u7ae0\u5206\u6790\u4e86GaN\u6676\u9ad4\u7ba1\u66ff\u4ee3\u77fd\u529f\u7387\u6676\u9ad4\u7ba1\u7684\u539f\u56e0\u3002<\/p>\n \u300a\u6c2e\u5316\u93b5\u529f\u7387\u6676\u9ad4\u7ba1\u2014\u2014\u5668\u4ef6\u3001\u96fb\u8def\u8207\u61c9\u7528\uff08\u539f\u66f8\u7b2c3\u7248\uff09\u300b\u9069\u5408\u4f5c\u70ba\u5f9e\u4e8bGaN\u529f\u7387\u534a\u5c0e\u9ad4\u6280\u8853\u7814\u7a76\u7684\u79d1\u7814\u5de5\u4f5c\u8005\u3001\u5de5\u7a0b\u5e2b\u3001\u9ad8\u5e74\u7d1a\u672c\u79d1\u751f\u548c\u7814\u7a76\u751f\u7684\u53c3\u8003\u66f8\uff0c\u4e5f\u53ef\u4ee5\u4f5c\u70ba\u9ad8\u7b49\u9662\u6821\u5fae\u96fb\u5b50\u79d1\u5b78\u8207\u5de5\u7a0b\u3001\u96c6\u6210\u96fb\u8def\u79d1\u5b78\u8207\u5de5\u7a0b\u3001\u96fb\u529b\u96fb\u5b50\u6280\u8853\u5c08\u696d\u7684\u6559\u6750\u3002<\/p>\n \u4f5c\u8005\u7c21\u4ecb<\/span><\/strong><\/p>\n Alex Lidow\u535a\u58eb\uff0c\u7f8e\u570b\u5b9c\u666e\u96fb\u6e90\u8f49\u63db\uff08EPC\uff09\u516c\u53f8CEO\u3001\u570b\u969b\u6574\u6d41\u5668\u516c\u53f8\u539fCEO\uff0c\u7372\u5f97\u65af\u5766\u798f\u5927\u5b78\u535a\u58eb\u5b78\u4f4d\u3002<\/p>\n Michael de Rooij\u535a\u58eb\uff0c\u7f8e\u570bEPC\u516c\u53f8\u61c9\u7528\u5de5\u7a0b\u526f\u7e3d\u88c1\uff0c\u7372\u5f97\u7d04\u7ff0\u5167\u65af\u5821\u5927\u5b78\u535a\u58eb\u5b78\u4f4d\u3002<\/p>\n Johan Strydom\u535a\u58eb\uff0c\u7f8e\u570b\u5fb7\u5dde\u5100\u5668\u516c\u53f8Kilby\u5be6\u9a57\u5ba4\u7684\u9ad8\u7d1a\u958b\u767c\u7d93\u7406\uff0c\u7372\u5f97\u7d04\u7ff0\u5167\u65af\u5821\u5927\u5b78\u535a\u58eb\u5b78\u4f4d\u3002<\/p>\n David Reusch\u535a\u58eb\uff0c\u7f8e\u570bVPT\u516c\u53f8\u9996\u5e2d\u79d1\u5b78\u5bb6\uff0c\u7372\u5f97\u5f17\u5409\u5c3c\u4e9e\u7406\u5de5\u5927\u5b78\u535a\u58eb\u5b78\u4f4d\u3002<\/p>\n John Glaser\uff0c\u7f8e\u570bEPC\u516c\u53f8\u61c9\u7528\u5de5\u7a0b\u7e3d\u76e3\u3002<\/p>\n \u76ee\u9304<\/span><\/strong><\/p>\n \u8b6f\u8005\u5e8f<\/p>\n \u539f\u66f8\u524d\u8a00<\/p>\n \u81f4\u8b1d<\/p>\n \u7b2c1\u7ae0 GaN\u6280\u8853\u6982\u8ff01<\/p>\n 1.1\u77fd\u529f\u7387MOSFET\uff081976\uff5e2010\u5e74\uff091<\/p>\n 1.2GaN\u57fa\u529f\u7387\u5668\u4ef61<\/p>\n 1.3GaN\u548cSiC\u6750\u6599\u8207\u7845\u6750\u6599\u7684\u6bd4\u8f032<\/p>\n 1.3.1\u7981\u5e36\u5bec\u5ea6Eg3<\/p>\n 1.3.2\u81e8\u754c\u96fb\u5834Ecrit3<\/p>\n 1.3.3\u5c0e\u901a\u96fb\u963bRDS\uff08on\uff093<\/p>\n 1.3.4\u4e8c\u7dad\u96fb\u5b50\u6c234<\/p>\n 1.4GaN\u6676\u9ad4\u7ba1\u7684\u57fa\u672c\u7d50\u69cb5<\/p>\n 1.4.1\u51f9\u69fd\u67f5\u589e\u5f37\u578b\u7d50\u69cb6<\/p>\n 1.4.2\u6ce8\u5165\u67f5\u589e\u5f37\u578b\u7d50\u69cb7<\/p>\n 1.4.3pGaN\u67f5\u589e\u5f37\u578b\u7d50\u69cb7<\/p>\n 1.4.4\u6df7\u5408\u589e\u5f37\u578b\u7d50\u69cb7<\/p>\n 1.4.5GaN HEMT\u53cd\u56ae\u5c0e\u901a8<\/p>\n 1.5GaN\u6676\u9ad4\u7ba1\u7684\u88fd\u50999<\/p>\n 1.5.1\u896f\u5e95\u6750\u6599\u7684\u9078\u64c79<\/p>\n 1.5.2\u7570\u8cea\u5916\u5ef6\u6280\u885310<\/p>\n 1.5.3\u6676\u5713\u8655\u740611<\/p>\n 1.5.4\u5668\u4ef6\u8207\u5916\u90e8\u7684\u96fb\u6c23\u9023\u63a512<\/p>\n 1.6GaN\u96c6\u6210\u96fb\u8def13<\/p>\n 1.7\u672c\u7ae0\u5c0f\u7d5016<\/p>\n \u53c3\u8003\u6587\u737b16<\/p>\n \u7b2c2\u7ae0 GaN\u6676\u9ad4\u7ba1\u7684\u96fb\u6c23\u7279\u602719<\/p>\n 2.1\u5f15\u8a0019<\/p>\n 2.2\u5668\u4ef6\u7684\u984d\u5b9a\u503c19<\/p>\n 2.2.1\u6f0f\u6e90\u96fb\u58d319<\/p>\n 2.3\u5c0e\u901a\u96fb\u963bRDS(on)23<\/p>\n 2.4\u95be\u503c\u96fb\u58d325<\/p>\n 2.5\u96fb\u5bb9\u548c\u96fb\u837727<\/p>\n 2.6\u53cd\u5411\u50b3\u8f3829<\/p>\n 2.7\u672c\u7ae0\u5c0f\u7d5031<\/p>\n \u53c3\u8003\u6587\u737b31<\/p>\n \u7b2c3\u7ae0 GaN\u6676\u9ad4\u7ba1\u7684\u9a45\u52d5\u7279\u602733<\/p>\n 3.1\u5f15\u8a0033<\/p>\n 3.2\u67f5\u6975\u9a45\u52d5\u96fb\u58d334<\/p>\n 3.3\u67f5\u6975\u9a45\u52d5\u96fb\u963b36<\/p>\n 3.4\u7528\u65bc\u67f5\u6975\u6ce8\u5165\u6676\u9ad4\u7ba1\u7684\u96fb\u5bb9\u96fb\u6d41\u5f0f\u67f5\u6975\u9a45\u52d5\u96fb\u8def37<\/p>\n 3.5dv\/dt\u6297\u64fe\u5ea639<\/p>\n 3.5.1\u5c0e\u901a\u6642dv\/dt\u63a7\u523639<\/p>\n 3.5.2\u4e92\u88dc\u5668\u4ef6\u5c0e\u901a39<\/p>\n 3.6di\/dt\u6297\u64fe\u5ea642<\/p>\n 3.6.1\u5668\u4ef6\u5c0e\u901a\u548c\u5171\u6e90\u96fb\u611f42<\/p>\n 3.6.2\u95dc\u65b7\u72c0\u614b\u5668\u4ef6di\/dt43<\/p>\n 3.7\u81ea\u8209\u548c\u6d6e\u52d5\u96fb\u6e90 43<\/p>\n 3.8\u77ac\u614b\u6297\u64fe\u5ea646<\/p>\n 3.9\u8003\u616e\u9ad8\u983b\u56e0\u7d2048<\/p>\n 3.10\u589e\u5f37\u578bGaN\u6676\u9ad4\u7ba1\u7684\u67f5\u6975\u9a45\u52d5\u566848<\/p>\n 3.11\u5171\u6e90\u5171\u67f5\u3001\u76f4\u63a5\u9a45\u52d5\u548c\u9ad8\u58d3\u914d\u7f6e49<\/p>\n 3.11.1\u5171\u6e90\u5171\u67f5\u5668\u4ef649<\/p>\n 3.11.2\u76f4\u63a5\u9a45\u52d5\u5668\u4ef651<\/p>\n 3.11.3\u9ad8\u58d3\u914d\u7f6e51<\/p>\n 3.12\u672c\u7ae0\u5c0f\u7d5052<\/p>\n \u53c3\u8003\u6587\u737b52<\/p>\n \u7b2c4\u7ae0 GaN\u6676\u9ad4\u7ba1\u96fb\u8def\u4f48\u5c4056<\/p>\n 4.1\u5f15\u8a0056<\/p>\n 4.2\u6e1b\u5c0f\u5bc4\u751f\u96fb\u611f56<\/p>\n 4.3\u5e38\u898f\u529f\u7387\u8ff4\u8def\u8a2d\u8a0858<\/p>\n 4.3.1\u6a6b\u5411\u529f\u7387\u8ff4\u8def\u8a2d\u8a0858<\/p>\n 4.3.2\u5782\u76f4\u529f\u7387\u8ff4\u8def\u8a2d\u8a0859<\/p>\n 4.4\u529f\u7387\u8ff4\u8def\u7684\u512a\u531659<\/p>\n 4.4.1\u96c6\u6210\u5c0d\u65bc\u5bc4\u751f\u6548\u61c9\u7684\u5f71\u97ff60<\/p>\n 4.5\u4e26\u806fGaN\u6676\u9ad4\u7ba161<\/p>\n 4.5.1\u55ae\u958b\u95dc\u61c9\u7528\u4e2d\u7684\u4e26\u806fGaN\u6676\u9ad4\u7ba161<\/p>\n 4.5.2\u534a\u6a4b\u61c9\u7528\u4e2d\u7684\u4e26\u806fGaN\u6676\u9ad4\u7ba164<\/p>\n 4.6\u672c\u7ae0\u5c0f\u7d5066<\/p>\n \u53c3\u8003\u6587\u737b67<\/p>\n \u7b2c5\u7ae0 GaN\u6676\u9ad4\u7ba1\u7684\u5efa\u6a21\u548c\u6e2c\u91cf68<\/p>\n 5.1\u5f15\u8a0068<\/p>\n 5.2\u96fb\u5b78\u5efa\u6a2168<\/p>\n 5.2.1\u5efa\u6a21\u57fa\u790e68<\/p>\n 5.2.2\u57fa\u790e\u5efa\u6a21\u7684\u5c40\u9650\u602770<\/p>\n 5.2.3\u96fb\u8def\u6a21\u64ec\u7684\u5c40\u9650\u602772<\/p>\n 5.3GaN\u6676\u9ad4\u7ba1\u6027\u80fd\u6e2c\u91cf73<\/p>\n 5.3.1\u96fb\u58d3\u6e2c\u91cf\u8981\u6c4275<\/p>\n 5.3.2\u63a2\u6e2c\u548c\u6e2c\u91cf\u6280\u885377<\/p>\n 5.3.3\u6e2c\u91cf\u672a\u63a5\u5730\u53c3\u8003\u4fe1\u865f79<\/p>\n 5.3.4\u96fb\u6d41\u6e2c\u91cf\u8981\u6c4280<\/p>\n 5.4\u672c\u7ae0\u5c0f\u7d5080<\/p>\n \u53c3\u8003\u6587\u737b81<\/p>\n \u7b2c6\u7ae0 \u6563\u71b1\u7ba1\u740683<\/p>\n 6.1\u5f15\u8a0083<\/p>\n 6.2\u71b1\u7b49\u6548\u96fb\u8def83<\/p>\n 6.2.1\u5f15\u7dda\u6846\u67b6\u5c01\u88dd\u4e2d\u7684\u71b1\u963b83<\/p>\n 6.2.2\u82af\u7247\u7d1a\u5c01\u88dd\u4e2d\u7684\u71b1\u963b84<\/p>\n 6.2.3\u7d50-\u74b0\u5883\u71b1\u963b85<\/p>\n 6.2.4\u77ac\u614b\u71b1\u963b86<\/p>\n 6.3\u4f7f\u7528\u6563\u71b1\u7247\u63d0\u9ad8\u6563\u71b1\u80fd\u529b87<\/p>\n 6.3.1\u6563\u71b1\u7247\u548c\u71b1\u754c\u9762\u6750\u6599\u7684\u9078\u64c787<\/p>\n 6.3.2\u7528\u65bc\u5e95\u90e8\u51b7\u537b\u7684\u6563\u71b1\u7247\u9644\u4ef688<\/p>\n 6.3.3\u7528\u65bc\u591a\u908a\u51b7\u537b\u7684\u6563\u71b1\u7247\u9644\u4ef689<\/p>\n 6.4\u7cfb\u7d71\u7d1a\u71b1\u5206\u679090<\/p>\n 6.4.1\u5177\u6709\u5206\u7acbGaN\u6676\u9ad4\u7ba1\u7684\u529f\u7387\u7d1a\u71b1\u6a21\u578b90<\/p>\n 6.4.2\u5177\u6709\u55ae\u7247GaN\u96c6\u6210\u96fb\u8def\u7684\u529f\u7387\u7d1a\u71b1\u6a21\u578b92<\/p>\n 6.4.3\u591a\u76f8\u7e6b\u7d71\u7684\u71b1\u6a21\u578b93<\/p>\n 6.4.4\u6eab\u5ea6\u6e2c\u91cf94<\/p>\n 6.4.5\u5be6\u9a57\u8868\u5fb596<\/p>\n 6.4.6\u61c9\u7528\u5be6\u4f8b98<\/p>\n 6.5\u672c\u7ae0\u5c0f\u7d50101<\/p>\n \u53c3\u8003\u6587\u737b102<\/p>\n \u7b2c7\u7ae0 \u786c\u958b\u95dc\u62d3\u64b2105<\/p>\n 7.1\u5f15\u8a00105<\/p>\n 7.2\u786c\u958b\u95dc\u640d\u8017\u5206\u6790105<\/p>\n 7.2.1GaN\u6676\u9ad4\u7ba1\u7684\u786c\u958b\u95dc\u904e\u7a0b106<\/p>\n 7.2.2\u8f38\u51fa\u96fb\u5bb9COSS\u640d\u8017108<\/p>\n 7.2.3\u5c0e\u901a\u91cd\u758a\u640d\u8017110<\/p>\n 7.2.4\u95dc\u65b7\u91cd\u758a\u640d\u8017116<\/p>\n 7.2.5\u67f5\u6975\u96fb\u8377QG\u640d\u8017118<\/p>\n 7.2.6\u53cd\u56ae\u5c0e\u901a\u640d\u8017PSD118<\/p>\n 7.2.7\u53cd\u5411\u6062\u5fa9\u96fb\u8377QRR\u640d\u8017123<\/p>\n 7.2.8\u786c\u958b\u95dc\u54c1\u8cea\u56e0\u6578123<\/p>\n 7.3\u5bc4\u751f\u96fb\u611f\u5c0d\u786c\u958b\u95dc\u640d\u8017\u7684\u5f71\u97ff124<\/p>\n 7.3.1\u5171\u6e90\u96fb\u611fLCS\u7684\u5f71\u97ff125<\/p>\n 7.3.2\u529f\u7387\u8ff4\u8def\u96fb\u611f\u5c0d\u5668\u4ef6\u640d\u8017\u7684\u5f71\u97ff126<\/p>\n 7.4\u983b\u7387\u5c0d\u78c1\u7279\u6027\u7684\u5f71\u97ff129<\/p>\n 7.4.1\u8b8a\u58d3\u5668129<\/p>\n 7.4.2\u96fb\u611f130<\/p>\n 7.5\u964d\u58d3\u8b8a\u63db\u5668\u5be6\u4f8b130<\/p>\n 7.5.1\u8207\u5be6\u9a57\u6e2c\u91cf\u503c\u6bd4\u8f03135<\/p>\n 7.5.2\u8003\u616e\u5bc4\u751f\u96fb\u611f136<\/p>\n 7.6\u672c\u7ae0\u5c0f\u7d50139<\/p>\n \u53c3\u8003\u6587\u737b139<\/p>\n \u7b2c8\u7ae0 \u8ae7\u632f\u548c\u8edf\u958b\u95dc\u8b8a\u63db\u5668141<\/p>\n 8.1\u5f15\u8a00141<\/p>\n 8.2\u8ae7\u632f\u8207\u8edf\u958b\u95dc\u6280\u8853141<\/p>\n 8.2.1\u96f6\u96fb\u58d3\u958b\u95dc\u548c\u96f6\u96fb\u6d41\u958b\u95dc141<\/p>\n 8.2.2\u8ae7\u632fDC-DC\u8b8a\u63db\u5668142<\/p>\n 8.2.3\u8ae7\u632f\u7db2\u7d61\u7d44\u5408142<\/p>\n 8.2.4\u8ae7\u632f\u7db2\u7d61\u5de5\u4f5c\u539f\u7406143<\/p>\n 8.2.5\u8ae7\u632f\u958b\u95dc\u55ae\u5143144<\/p>\n 8.2.6\u8edf\u958b\u95dcDC-DC\u8b8a\u63db\u5668144<\/p>\n 8.3\u8ae7\u632f\u548c\u8edf\u958b\u95dc\u61c9\u7528\u4e2d\u7684\u95dc\u9375\u5668\u4ef6\u53c3\u6578145<\/p>\n 8.3.1\u8f38\u51fa\u96fb\u8377QOSS145<\/p>\n 8.3.2\u901a\u904e\u88fd\u9020\u5546\u6578\u64da\u8868\u78ba\u5b9a\u8f38\u51fa\u96fb\u8377145<\/p>\n 8.3.3GaN\u6676\u9ad4\u7ba1\u548c\u77fd MOSFET\u8f38\u51fa\u96fb\u8377\u6bd4\u8f03147<\/p>\n 8.3.4\u67f5\u6975\u96fb\u8377QG148<\/p>\n 8.3.5\u8ae7\u632f\u548c\u8edf\u958b\u95dc\u61c9\u7528\u4e2d\u67f5\u6975\u96fb\u8377\u7684\u78ba\u5b9a148<\/p>\n 8.3.6GaN\u6676\u9ad4\u7ba1\u548c\u77fdMOSFET\u67f5\u6975\u96fb\u8377\u6bd4\u8f03148<\/p>\n 8.3.7GaN\u6676\u9ad4\u7ba1\u548c\u77fd MOSFET\u6027\u80fd\u6307\u6a19\u6bd4\u8f03149<\/p>\n 8.4\u9ad8\u983b\u8ae7\u632f\u7e3d\u7dda\u8b8a\u63db\u5668\u5be6\u4f8b150<\/p>\n 8.4.1\u8ae7\u632fGaN\u548c\u77fd\u7e3d\u7dda\u8b8a\u63db\u5668\u8a2d\u8a08152<\/p>\n 8.4.2GaN\u548c\u77fd\u5668\u4ef6\u6bd4\u8f03153<\/p>\n 8.4.3\u96f6\u96fb\u58d3\u958b\u95dc\u8f49\u63db153<\/p>\n 8.4.4\u6548\u7387\u548c\u529f\u7387\u640d\u8017\u6bd4\u8f03155<\/p>\n 8.4.5\u5668\u4ef6\u9032\u4e00\u6b65\u6539\u9032\u5c0d\u6027\u80fd\u7684\u5f71\u97ff157<\/p>\n 8.5\u672c\u7ae0\u5c0f\u7d50158<\/p>\n \u53c3\u8003\u6587\u737b158<\/p>\n \u7b2c9\u7ae0 \u5c04\u983b\u6027\u80fd160<\/p>\n 9.1\u5f15\u8a00160<\/p>\n 9.2\u5c04\u983b\u6676\u9ad4\u7ba1\u548c\u958b\u95dc\u6676\u9ad4\u7ba1\u7684\u5340\u5225161<\/p>\n 9.3\u5c04\u983b\u57fa\u790e\u77e5\u8b58162<\/p>\n 9.4\u5c04\u983b\u6676\u9ad4\u7ba1\u6307\u6a19163<\/p>\n 9.4.1\u5c04\u983b\u6676\u9ad4\u7ba1\u9ad8\u983b\u7279\u6027\u7684\u78ba\u5b9a164<\/p>\n 9.4.2\u8003\u616e\u6563\u71b1\u7684\u8108\u885d\u6e2c\u8a66165<\/p>\n 9.4.3s\u53c3\u6578\u5206\u6790166<\/p>\n 9.5\u4f7f\u7528\u5c0f\u4fe1\u865fs\u53c3\u6578\u7684\u653e\u5927\u5668\u8a2d\u8a08169<\/p>\n 9.5.1\u689d\u4ef6\u7a69\u5b9a\u7684\u96d9\u908a\u6676\u9ad4\u7ba1\u653e\u5927\u5668\u8a2d\u8a08169<\/p>\n 9.6\u653e\u5927\u5668\u8a2d\u8a08\u5be6\u4f8b170<\/p>\n 9.6.1\u5339\u914d\u548c\u504f\u7f6e\u5668\u7684\u7db2\u7d61\u8a2d\u8a08172<\/p>\n 9.6.2\u5be6\u9a57\u9a57\u8b49174<\/p>\n 9.7\u672c\u7ae0\u5c0f\u7d50176<\/p>\n \u53c3\u8003\u6587\u737b177<\/p>\n \u7b2c10\u7ae0 DC-DC\u529f\u7387\u8b8a\u63db179<\/p>\n 10.1\u5f15\u8a00179<\/p>\n 10.2\u975e\u9694\u96e2DC-DC\u8b8a\u63db\u5668179<\/p>\n 10.2.1\u5e36\u5206\u7acb\u5668\u4ef6\u768412VIN-1.2VOUT\u964d\u58d3\u8b8a\u63db\u5668179<\/p>\n 10.2.212VIN-1VOUT\u55ae\u7247\u534a\u6a4b\u96c6\u6210\u96fb\u8def\u8ca0\u8f09\u9ede\u6a21\u584a183<\/p>\n 10.2.3\u66f4\u9ad8\u983b12VIN\u55ae\u7247\u534a\u6a4b\u96c6\u6210\u96fb\u8def\u8ca0\u8f09\u9ede\u6a21\u584a185<\/p>\n 10.2.428VIN-3.3VOUT\u8ca0\u8f09\u9ede\u6a21\u584a187<\/p>\n 10.2.5\u5927\u96fb\u6d41\u61c9\u7528\u4e2d\u5e36\u4e26\u806fGaN\u6676\u9ad4\u7ba1\u768448VIN-12VOUT\u964d\u58d3\u8b8a\u63db\u5668187<\/p>\n 10………..<\/p>\n \u66f8\u6458\u63d2\u756b<\/span><\/strong><\/p>\n ————————————————————————————-<\/p>\n \u3010\u534a\u5c0e\u9ad4\u5de5\u7a0b\u5c0e\u8ad6\u3011 \u5167\u5bb9\u7c21\u4ecb<\/span><\/strong><\/p>\n \u300a\u534a\u5c0e\u9ad4\u5de5\u7a0b\u5c0e\u8ad6\u300b\u7b2c1\u7ae0\u6982\u8ff0\u4e86\u534a\u5c0e\u9ad4\u5340\u5225\u65bc\u5176\u4ed6\u56fa\u9ad4\u7684\u57fa\u672c\u7269\u7406\u7279\u6027\uff0c\u9019\u4e9b\u7279\u6027\u662f\u7406\u89e3\u534a\u5c0e\u9ad4\u5668\u4ef6\u5de5\u4f5c\u539f\u7406\u7684\u5fc5\u8981\u689d\u4ef6\u3002\u7b2c2\u7ae0\u56de\u9867\u4e86\u534a\u5c0e\u9ad4\u6750\u6599\uff0c\u5305\u62ec\u7121\u6a5f\u3001\u5316\u5408\u7269\u3001\u6709\u6a5f\u534a\u5c0e\u9ad4\u6750\u6599\u3002\u540c\u6642\uff0c\u7b2c2\u7ae0\u4e5f\u4ecb\u7d39\u4e86\u6709\u4ee3\u8868\u6027\u7684\u7d55\u7de3\u9ad4\u548c\u5c0e\u9ad4\u7684\u6750\u6599\uff0c\u5b83\u5011\u662f\u69cb\u6210\u53ef\u4ee5\u5de5\u4f5c\u7684\u534a\u5c0e\u9ad4\u5668\u4ef6\u548c\u96fb\u8def\u6240\u5fc5\u4e0d\u53ef\u5c11\u7684\u7d44\u6210\u90e8\u5206\u3002\u800c\u9019\u4e9b\u5668\u4ef6\u548c\u96fb\u8def\u662f\u5728\u7b2c3\u7ae0\u6982\u8ff0\u7684\u3002\u7b2c4\u7ae0\u662f\u95dc\u65bc\u534a\u5c0e\u9ad4\u5de5\u85dd\u7684\u57fa\u790e\u77e5\u8b58\uff0c\u4e26\u4e14\u7528\u901a\u4fd7\u7684\u8a9e\u8a00\u8a0e\u8ad6\u4e86\u534a\u5c0e\u9ad4\u88fd\u9020\u4e2d\u4f7f\u7528\u7684\u65b9\u6cd5\u3001\u8a2d\u5099\u3001\u5de5\u5177\u548c\u4ecb\u8cea\u3002\u5728\u6982\u8ff0\u4e86\u534a\u5c0e\u9ad4\u5de5\u85dd\u6280\u8853\u4e4b\u5f8c\uff0c\u7b2c5\u7ae0\u8a0e\u8ad6\u4e86\u4e3b\u6d41\u534a\u5c0e\u9ad4\u88fd\u9020\u5de5\u85dd\u4e2d\u6d89\u53ca\u7684\u5404\u55ae\u6b65\u5de5\u85dd\u3002\u7b2c6\u7ae0\u7c21\u8981\u6982\u8ff0\u4e86\u534a\u5c0e\u9ad4\u6750\u6599\u548c\u5de5\u85dd\u8868\u5fb5\u7684\u57fa\u672c\u539f\u7406\u3002<\/p>\n \u300a\u534a\u5c0e\u9ad4\u5de5\u7a0b\u5c0e\u8ad6\u300b\u9069\u5408\u534a\u5c0e\u9ad4\u5de5\u7a0b\u53ca\u76f8\u95dc\u9818\u57df\u7684\u5b78\u751f\u3001\u7814\u7a76\u4eba\u54e1\u548c\u5c08\u696d\u4eba\u58eb\u95b1\u8b80\u3002<\/p>\n \u4f5c\u8005\u7c21\u4ecb<\/span><\/strong><\/p>\n Jerzy Ruzyllo\u662f\u7f8e\u570b\u8cd3\u5915\u6cd5\u5c3c\u4e9e\u5dde\u7acb\u5927\u5b78\u96fb\u6c23\u5de5\u7a0b\u8207\u8a08\u7b97\u6a5f\u79d1\u5b78\u5b78\u9662\u7684\u5091\u51fa\u540d\u8b7d\u6559\u6388\u3002\u4ed6\u57281977\u5e74\u7372\u5f97\u535a\u58eb\u5b78\u4f4d\u5f8c\u65bc1984\u5e74\u52a0\u5165\u8cd3\u5915\u6cd5\u5c3c\u4e9e\u5dde\u7acb\u5927\u5b78\uff0c\u4e26\u5728\u6ce2\u862d\u83ef\u6c99\u7406\u5de5\u5927\u5b78\u4efb\u6559\u3002\u5728\u4ed6\u7684\u8077\u696d\u751f\u6daf\u4e2d\uff0cRuzyllo\u535a\u58eb\u7a4d\u6975\u53c3\u8207\u534a\u5c0e\u9ad4\u79d1\u5b78\u8207\u5de5\u7a0b\u9818\u57df\u7684\u7814\u7a76\u548c\u6559\u5b78\u3002 Ruzyllo\u535a\u58eb\u662f\u7f8e\u570b\u96fb\u6c23\u96fb\u5b50\u5de5\u7a0b\u5e2b\u5b78\u6703 \uff08IEEE\uff09\u7d42\u8eab\u6703\u58eb\u548c\u7f8e\u570b\u96fb\u5316\u5b78\u5b78\u6703\uff08ECS\uff09\u6703\u58eb\u3002<\/p>\n \u76ee\u9304<\/span><\/strong><\/p>\n \u524d\u8a00<\/p>\n \u7b2c1\u7ae0 \u534a\u5c0e\u9ad4\u7279\u6027<\/p>\n \u7ae0\u7bc0\u6982\u8ff0<\/p>\n 1.1\u56fa\u9ad4\u7684\u5c0e\u96fb\u6027<\/p>\n 1.1.1\u539f\u5b50\u9593\u7684\u50f9\u9375\u8207\u5c0e\u96fb\u6027<\/p>\n 1.1.2\u80fd\u5e36\u7d50\u69cb\u8207\u5c0e\u96fb\u6027<\/p>\n 1.2\u8f09\u6d41\u5b50<\/p>\n 1.2.1\u96fb\u5b50\u8207\u7a7a\u7a74<\/p>\n 1.2.2\u7522\u751f\u8207\u5fa9\u5408\u904e\u7a0b<\/p>\n 1.2.3\u8f09\u6d41\u5b50\u7684\u904b\u52d5<\/p>\n 1.3\u534a\u5c0e\u9ad4\u4ee5\u53ca\u5916\u754c\u7684\u5f71\u97ff<\/p>\n 1.3.1\u534a\u5c0e\u9ad4\u548c\u96fb\u5834\u4ee5\u53ca\u78c1\u5834<\/p>\n 1.3.2\u534a\u5c0e\u9ad4\u548c\u5149<\/p>\n 1.3.3\u534a\u5c0e\u9ad4\u548c\u6eab\u5ea6<\/p>\n 1.4\u7d0d\u7c73\u5c3a\u5ea6\u534a\u5c0e\u9ad4<\/p>\n \u95dc\u9375\u8a5e<\/p>\n \u7b2c2\u7ae0 \u534a\u5c0e\u9ad4\u6750\u6599<\/p>\n \u7ae0\u7bc0\u6982\u8ff0<\/p>\n 2.1\u56fa\u9ad4\u7684\u6676\u9ad4\u7d50\u69cb<\/p>\n 2.1.1\u6676\u683c<\/p>\n 2.1.2 \u7d50\u69cb\u7f3a\u9677<\/p>\n 2.2\u534a\u5c0e\u9ad4\u6750\u6599\u7cfb\u7d71\u7684\u69cb\u6210\u5143\u7d20<\/p>\n 2.2.1\u8868\u9762\u8207\u754c\u9762<\/p>\n 2.2.2\u8584\u819c<\/p>\n 2.3\u7121\u6a5f\u534a\u5c0e\u9ad4<\/p>\n 2.3.1\u55ae\u8cea\u534a\u5c0e\u9ad4<\/p>\n 2.3.2\u5316\u5408\u7269\u534a\u5c0e\u9ad4<\/p>\n 2.3.3\u7d0d\u7c73\u7121\u6a5f\u534a\u5c0e\u9ad4<\/p>\n 2.4\u6750\u6599\u9078\u64c7\u6a19\u6e96<\/p>\n 2.5\u6709\u6a5f\u534a\u5c0e\u9ad4<\/p>\n 2.6\u9ad4\u55ae\u6676\u7684\u5f62\u6210<\/p>\n 2.6.1CZ\u6cd5\u751f\u9577\u55ae\u6676<\/p>\n 2.6.2\u5176\u4ed6\u65b9\u6cd5<\/p>\n 2.7\u8584\u819c\u55ae\u6676\u7684\u5f62\u6210<\/p>\n 2.7.1\u5916\u5ef6\u6c89\u7a4d<\/p>\n 2.7.2\u6676\u683c\u5339\u914d\u548c\u6676\u683c\u5931\u914d\u7684\u5916\u5ef6\u6c89\u7a4d<\/p>\n 2.8\u896f\u5e95<\/p>\n 2.8.1\u534a\u5c0e\u9ad4\u896f\u5e95<\/p>\n 2.8.2\u975e\u534a\u5c0e\u9ad4\u896f\u5e95<\/p>\n 2.9\u8584\u819c\u7d55\u7de3\u9ad4<\/p>\n 2.9.1\u4e00\u822c\u6027\u8cea<\/p>\n 2.9.2\u591a\u7528\u9014\u8584\u819c\u7d55\u7de3\u9ad4<\/p>\n 2.9.3\u5c08\u7528\u8584\u819c\u7d55\u7de3\u9ad4<\/p>\n 2.10\u8584\u819c\u5c0e\u9ad4<\/p>\n 2.10.1\u91d1\u5c6c<\/p>\n 2.10.2\u91d1\u5c6c\u5408\u91d1<\/p>\n 2.10.3\u975e\u91d1\u5c6c\u5c0e\u9ad4<\/p>\n \u95dc\u9375\u8a5e<\/p>\n \u7b2c3\u7ae0 \u534a\u5c0e\u9ad4\u5668\u4ef6\u53ca\u5176\u4f7f\u7528<\/p>\n \u7ae0\u7bc0\u6982\u8ff0<\/p>\n 3.1\u534a\u5c0e\u9ad4\u5668\u4ef6<\/p>\n 3.2\u69cb\u5efa\u534a\u5c0e\u9ad4\u5668\u4ef6<\/p>\n 3.2.1\u6b50\u59c6\u63a5\u89f8<\/p>\n 3.2.2\u52e2\u58d8<\/p>\n 3.3\u5169\u7aef\u5668\u4ef6\uff1a\u4e8c\u6975\u7ba1<\/p>\n 3.3.1\u4e8c\u6975\u7ba1<\/p>\n 3.3.2\u91d1\u5c6c-\u6c27\u5316\u7269-\u534a\u5c0e\u9ad4\uff08MOS\uff09\u96fb\u5bb9\u5668<\/p>\n 3.4\u4e09\u7aef\u5668\u4ef6\uff1a\u6676\u9ad4\u7ba1<\/p>\n 3.4.1\u6676\u9ad4\u7ba1\u6982\u8ff0<\/p>\n 3.4.2\u6676\u9ad4\u7ba1\u7a2e\u985e<\/p>\n 3.4.3MOSFET\u7684\u5de5\u4f5c\u539f\u7406<\/p>\n 3.4.4\u4e92\u88dc\u91d1\u5c6c-\u6c27\u5316\u7269-\u534a\u5c0e\u9ad4\uff08CMOS\uff09<\/p>\n 3.4.5MOSFET\u7684\u767c\u5c55<\/p>\n 3.4.6\u8584\u819c\u6676\u9ad4\u7ba1\uff08TFT\uff09<\/p>\n 3.5\u96c6\u6210\u96fb\u8def<\/p>\n 3.6\u5716\u50cf\u986f\u793a\u548c\u5716\u50cf\u50b3\u611f\u5668\u4ef6<\/p>\n 3.7\u5fae\u6a5f\u96fb\u7cfb\u7d71\uff08MEMS\uff09\u8207\u50b3\u611f\u5668<\/p>\n 3.7.1MEMS\/NEMS\u5668\u4ef6<\/p>\n 3.7.2\u50b3\u611f\u5668<\/p>\n 3.8\u53ef\u7a7f\u6234\u53ca\u53ef\u690d\u5165\u534a\u5c0e\u9ad4\u5668\u4ef6\u7cfb\u7d71<\/p>\n \u95dc\u9375\u8a5e<\/p>\n \u7b2c4\u7ae0 \u5de5\u85dd\u6280\u8853<\/p>\n \u7ae0\u7bc0\u6982\u8ff0<\/p>\n 4.1\u5de5\u85dd\u89d2\u5ea6\u770b\u896f\u5e95<\/p>\n 4.1.1\u6676\u5713\u896f\u5e95<\/p>\n 4.1.2\u5927\u9762\u7a4d\u896f\u5e95<\/p>\n 4.1.3\u67d4\u6027\u896f\u5e95<\/p>\n 4.1.4\u95dc\u65bc\u896f\u5e95\u7684\u9032\u4e00\u6b65\u8a0e\u8ad6<\/p>\n 4.2\u6db2\u76f8\uff08\u6fd5\u6cd5\uff09\u5de5\u85dd<\/p>\n 4.2.1\u6c34<\/p>\n 4.2.2\u7279\u6b8a\u5316\u5b78\u8a66\u5291<\/p>\n 4.2.3\u6676\u5713\u4e7e\u71e5<\/p>\n 4.3\u6c23\u76f8\uff08\u5e72\u6cd5\uff09\u5de5\u85dd<\/p>\n 4.3.1\u6c23\u9ad4<\/p>\n 4.3.2\u771f\u7a7a<\/p>\n 4.4\u534a\u5c0e\u9ad4\u88fd\u9020\u4e2d\u7684\u5de5\u85dd<\/p>\n 4.4.1\u71b1\u8655\u7406\u5de5\u85dd<\/p>\n 4.4.2\u7b49\u96e2\u5b50\u9ad4\u5de5\u85dd<\/p>\n 4.4.3\u96fb\u5b50\u548c\u96e2\u5b50\u675f\u5de5\u85dd<\/p>\n 4.4.4\u5316\u5b78\u5de5\u85dd<\/p>\n 4.4.5\u5149\u5316\u5b78\u5de5\u85dd<\/p>\n 4.4.6\u5316\u5b78\u6a5f\u68b0\u5de5\u85dd<\/p>\n 4.5\u6c61\u67d3\u63a7\u5236<\/p>\n 4.5.1\u6c61\u67d3\u7269<\/p>\n 4.5.2\u6f54\u6de8\u74b0\u5883<\/p>\n 4.6\u5de5\u85dd\u6574\u5408<\/p>\n \u95dc\u9375\u8a5e<\/p>\n \u7b2c5\u7ae0 \u88fd\u9020\u5de5\u85dd<\/p>\n \u7ae0\u7bc0\u6982\u8ff0<\/p>\n 5.1\u5716\u6848\u5b9a\u7fa9\u65b9\u5f0f<\/p>\n 5.1.1\u81ea\u4e0a\u800c\u4e0b\u5de5\u85dd<\/p>\n 5.1.2\u81ea\u4e0b\u800c\u4e0a\u5de5\u85dd<\/p>\n 5.1.3\u5716\u6848\u7684\u525d\u96e2\u5de5\u85dd<\/p>\n 5.1.4\u6a5f\u68b0\u63a9\u6a21<\/p>\n 5.1.5\u5370\u5237\u548c\u5370\u7ae0\u8f49\u79fb<\/p>\n 5.2\u81ea\u4e0a\u800c\u4e0b\u5de5\u85dd\u6b65\u9a5f<\/p>\n 5.3\u8868\u9762\u8655\u7406<\/p>\n 5.3.1\u8868\u9762\u6e05\u6d17<\/p>\n 5.3.2\u8868\u9762\u6539\u6027<\/p>\n 5.4\u589e\u6750\u5de5\u85dd<\/p>\n 5.4.1\u589e\u6750\u5de5\u85dd\u7684\u7279\u9ede<\/p>\n 5.4.2\u6c27\u5316\u751f\u9577\u8584\u819c\uff1a\u71b1\u6c27\u5316\u77fd\u6cd5<\/p>\n 5.4.3\u7269\u7406\u6c23\u76f8\u6c89\u7a4d\uff08PVD\uff09<\/p>\n 5.4.4\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d\uff08CVD\uff09<\/p>\n 5.4.5\u7269\u7406\u6db2\u76f8\u6c89\u7a4d\uff08PLD\uff09<\/p>\n 5.4.6\u96fb\u5316\u5b78\u6c89\u7a4d\uff08ECD\uff09<\/p>\n 5.4.73D\u6253\u5370<\/p>\n 5.5\u5e73\u9762\u5716\u6848\u8f49\u79fb<\/p>\n 5.5.1\u5e73\u9762\u5716\u6848\u8f49\u79fb\u6280\u8853\u7684\u5be6\u73fe<\/p>\n 5.5.2\u5149\u523b<\/p>\n 5.5.3\u5149\u523b\u4e2d\u7684\u66dd\u5149\u6280\u8853\u53ca\u5de5\u5177<\/p>\n 5.5.4\u96fb\u5b50\u675f\u5149\u523b<\/p>\n 5.6\u6e1b\u6750\u5de5\u85dd<\/p>\n 5.6.1\u523b\u8755\u5de5\u85dd\u7684\u7279\u9ede<\/p>\n 5.6.2\u6fd5\u6cd5\u523b\u8755<\/p>\n 5.6.3\u84b8\u6c23\u523b\u8755<\/p>\n 5.6.4\u5e72\u6cd5\u523b\u8755<\/p>\n 5.6.5\u53bb\u81a0<\/p>\n 5.7\u9078\u64c7\u6027\u647b\u96dc<\/p>\n 5.7.1\u64f4\u6563\u647b\u96dc<\/p>\n 5.7.2\u96e2\u5b50\u6ce8\u5165\u647b\u96dc<\/p>\n 5.8\u63a5\u89f8\u548c\u4e92\u9023\u5de5\u85dd<\/p>\n 5.8.1\u63a5\u89f8<\/p>\n 5.8.2\u4e92\u9023<\/p>\n 5.8.3\u5927\u99ac\u58eb\u9769\u5de5\u85dd\uff08\u9472\u5d4c\u5de5\u85dd\uff09<\/p>\n 5.9\u7d44\u88dd\u548c\u5c01\u88dd\u5de5\u85dd<\/p>\n 5.9.1\u6982\u8ff0<\/p>\n 5.9.2\u5c01\u88dd\u5de5\u85dd<\/p>\n 5.9.3\u534a\u5c0e\u9ad4\u5c01\u88dd\u6280\u8853\u6982\u6cc1<\/p>\n \u95dc\u9375\u8a5e<\/p>\n \u7b2c6\u7ae0 \u534a\u5c0e\u9ad4\u6750\u6599\u8207\u5de5\u85dd\u8868\u5fb5<\/p>\n \u7ae0\u7bc0\u6982\u8ff0<\/p>\n 6.1\u76ee\u7684<\/p>\n 6.2\u65b9\u6cd5<\/p>\n 6.3\u61c9\u7528\u8209\u4f8b<\/p>\n \u95dc\u9375\u8a5e<\/p>\n \u53c3\u8003\u6587\u737b<\/p>\n \u66f8\u6458\u63d2\u756b<\/span><\/strong><\/p>\n","protected":false},"excerpt":{"rendered":" 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